晶圓清洗設備市場 - 全球產業規模、佔有率、趨勢、機會和預測，按設備類型、晶圓尺寸、功能、應用、地區和競爭格局分類，2021-2031年預測

全球晶圓清洗設備市場規模將從2025年的72.3億美元成長到2031年的114.2億美元，複合年成長率（CAGR）為7.92%。晶圓清洗設備包含專門的精密機械，旨在清除半導體晶圓表面的雜質，例如顆粒物、有機污染物和金屬殘留物，同時不會損壞精密的電路圖案。市場成長的根本動力來自於電晶體架構向小型化方向的轉變以及人工智慧晶片大規模生產的擴張，這些都需要絕對的表面完整性來確保良率可靠性。

主要市場促進因素

半導體節點的微型化和3D架構的演進，對高精度污染物去除策略提出了更高的要求，以維持裝置性能和良率。隨著製造商向環柵（GAA）和垂直3D NAND結構等複雜電晶體設計轉型，為防止高縱橫比特徵出現致命缺陷，所需的清洗步驟也隨之增加。

主要市場挑戰

在先進製程節點上清洗高深寬比結構所涉及的技術複雜性，對晶圓清洗設備市場的擴張構成了重大障礙。隨著半導體架構向日益脆弱的設計過渡，有效去除雜質所需的物理力也帶來了更高的結構坍塌或圖案損壞風險。

主要市場趨勢

隨著半導體製造商在提高良率的同時，也日益重視環境永續性和法規遵循性，採用無硫酸綠色清洗化學品已成為關鍵趨勢。與嚴重依賴硫酸和過氧化物等腐蝕性溶劑的傳統製程不同，這種轉變著重於使用無害、可生物分解的替代品，從而最大限度地降低危險廢物處理成本，並減少產業的碳足跡。

目錄

第1章：產品概述

第2章：研究方法

第3章：執行概要

第4章：顧客之聲

第5章：全球晶圓清洗設備市場展望

• 市場規模及預測
  • 按價值
• 市佔率及預測
  • 依晶圓尺寸（300毫米、200毫米、125毫米）
  • 依功能分類（手動設備、自動設備、半自動設備）
  • 按下應用領域（LED、MEMS、記憶體、射頻元件、其他）
  • 按地區
  • 按公司（2025 年）
• 市場地圖

第6章：北美晶圓清洗設備市場展望

• 市場規模及預測
• 市佔率及預測
• 北美洲：國家分析
  • 美國
  • 加拿大
  • 墨西哥

第7章：歐洲晶圓清洗設備市場展望

• 市場規模及預測
• 市佔率及預測
• 歐洲：國家分析
  • 德國
  • 法國
  • 英國
  • 義大利
  • 西班牙

第8章：亞太地區晶圓清洗設備市場展望

• 市場規模及預測
• 市佔率及預測
• 亞太地區：國家分析
  • 中國
  • 印度
  • 日本
  • 韓國
  • 澳洲

第9章：中東和非洲晶圓清洗設備市場展望

• 市場規模及預測
• 市佔率及預測
• 中東和非洲：國家分析
  • 沙烏地阿拉伯
  • 阿拉伯聯合大公國
  • 南非

第10章：南美洲晶圓清洗設備市場展望

• 市場規模及預測
• 市佔率及預測
• 南美洲：國家分析
  • 巴西
  • 哥倫比亞
  • 阿根廷

第11章：市場動態

• 促進要素
• 挑戰

第12章：市場趨勢與發展

• 併購
• 產品發布
• 最新進展

第13章：全球晶圓清洗設備市場：SWOT分析

第14章：波特五力分析

• 產業競爭
• 新進入者的潛力
• 供應商議價能力
• 顧客的力量
• 替代產品的威脅

第15章：競爭格局

• Applied Materials, Inc.
• Lam Research Corporation
• SCREEN Holdings Co., Ltd.
• Tokyo Electron Limited
• Veeco Instruments Inc.
• Modutek Corporation
• ACM Research, Inc.
• Entegris, Inc.
• Shibaura Mechatronics Corporation
• PVA TePla AG

第16章：策略建議

第17章調查會社について,免責事項

The Global Wafer Cleaning Equipment Market will grow from USD 7.23 Billion in 2025 to USD 11.42 Billion by 2031 at a 7.92% CAGR. Wafer cleaning equipment comprises specialized precision machinery designed to eliminate impurities such as particulate matter, organic contaminants, and metallic residues from semiconductor wafer surfaces without damaging delicate circuit patterns. The market is fundamentally supported by the structural shift toward increasingly miniaturized transistor architectures and the expansion of high-volume manufacturing for artificial intelligence chips, which necessitate absolute surface integrity to ensure yield reliability.

Key Market Drivers

The miniaturization of semiconductor nodes and the evolution of 3D architectures necessitate highly precise contaminant removal strategies to maintain device performance and manufacturing yields. As manufacturers transition to complex transistor designs like Gate-All-Around and vertical 3D NAND structures, the number of required cleaning steps increases to prevent fatal defects in high-aspect-ratio features. This technological imperative is driven by the rapid adoption of advanced logic nodes which require pristine surface integrity for functioning.

Key Market Challenges

The technical complexity associated with cleaning high-aspect-ratio features at advanced nodes presents a substantial barrier to the expansion of the wafer cleaning equipment market. As semiconductor architectures transition to increasingly fragile designs, the physical force required for effective impurity removal carries a heightened risk of causing structural collapse or pattern damage. This fragility forces manufacturers to invest in highly specialized, non-destructive cleaning technologies, which significantly increases development costs and lengthens the time required to validate new machinery for mass production.

Key Market Trends

The adoption of Sulfuric-Acid-Free and Green Cleaning Chemistries has become a critical trend as semiconductor manufacturers prioritize environmental sustainability and regulatory compliance alongside yield enhancement. Unlike traditional protocols heavily reliant on aggressive solvents like sulfuric acid and peroxides, this shift focuses on utilizing benign, biodegradable alternatives that minimize hazardous waste treatment costs and reduce the industry's carbon footprint. This transition is not merely experimental but is being operationalized at scale to meet stringent global environmental standards.

Key Market Players

• Applied Materials, Inc.
• Lam Research Corporation
• SCREEN Holdings Co., Ltd.
• Tokyo Electron Limited
• Veeco Instruments Inc.
• Modutek Corporation
• ACM Research, Inc.
• Entegris, Inc.
• Shibaura Mechatronics Corporation
• PVA TePla AG

Report Scope:

In this report, the Global Wafer Cleaning Equipment Market has been segmented into the following categories, in addition to the industry trends which have also been detailed below:

Wafer Cleaning Equipment Market, By Wafer Size:

• 300mm
• 200mm
• 125mm

Wafer Cleaning Equipment Market, By Functions:

• Manual Equipment
• Automatic Equipment
• Semi-Automatic Equipment

Wafer Cleaning Equipment Market, By Application:

• LED
• MEMS
• Memory
• RF Device Others

Wafer Cleaning Equipment Market, By Region:

• North America
• United States
• Canada
• Mexico
• Europe
• France
• United Kingdom
• Italy
• Germany
• Spain
• Asia Pacific
• China
• India
• Japan
• Australia
• South Korea
• South America
• Brazil
• Argentina
• Colombia
• Middle East & Africa
• South Africa
• Saudi Arabia
• UAE

Competitive Landscape

Company Profiles: Detailed analysis of the major companies present in the Global Wafer Cleaning Equipment Market.

Available Customizations:

Global Wafer Cleaning Equipment Market report with the given market data, TechSci Research offers customizations according to a company's specific needs. The following customization options are available for the report:

Company Information

• Detailed analysis and profiling of additional market players (up to five).

Table of Contents

1. Product Overview

• 1.1. Market Definition
• 1.2. Scope of the Market
  • 1.2.1. Markets Covered
  • 1.2.2. Years Considered for Study
  • 1.2.3. Key Market Segmentations

2. Research Methodology

• 2.1. Objective of the Study
• 2.2. Baseline Methodology
• 2.3. Key Industry Partners
• 2.4. Major Association and Secondary Sources
• 2.5. Forecasting Methodology
• 2.6. Data Triangulation & Validation
• 2.7. Assumptions and Limitations

3. Executive Summary

• 3.1. Overview of the Market
• 3.2. Overview of Key Market Segmentations
• 3.3. Overview of Key Market Players
• 3.4. Overview of Key Regions/Countries
• 3.5. Overview of Market Drivers, Challenges, Trends

4. Voice of Customer

5. Global Wafer Cleaning Equipment Market Outlook

• 5.1. Market Size & Forecast
  • 5.1.1. By Value
• 5.2. Market Share & Forecast
  • 5.2.1. By Wafer Size (300mm, 200mm, 125mm)
  • 5.2.2. By Functions (Manual Equipment, Automatic Equipment, Semi-Automatic Equipment)
  • 5.2.3. By Application (LED, MEMS, Memory, RF Device Others)
  • 5.2.4. By Region
  • 5.2.5. By Company (2025)
• 5.3. Market Map

6. North America Wafer Cleaning Equipment Market Outlook

• 6.1. Market Size & Forecast
  • 6.1.1. By Value
• 6.2. Market Share & Forecast
  • 6.2.1. By Wafer Size
  • 6.2.2. By Functions
  • 6.2.3. By Application
  • 6.2.4. By Country
• 6.3. North America: Country Analysis
  • 6.3.1. United States Wafer Cleaning Equipment Market Outlook
    • 6.3.1.1. Market Size & Forecast
      • 6.3.1.1.1. By Value
    • 6.3.1.2. Market Share & Forecast
      • 6.3.1.2.1. By Wafer Size
      • 6.3.1.2.2. By Functions
      • 6.3.1.2.3. By Application
  • 6.3.2. Canada Wafer Cleaning Equipment Market Outlook
    • 6.3.2.1. Market Size & Forecast
      • 6.3.2.1.1. By Value
    • 6.3.2.2. Market Share & Forecast
      • 6.3.2.2.1. By Wafer Size
      • 6.3.2.2.2. By Functions
      • 6.3.2.2.3. By Application
  • 6.3.3. Mexico Wafer Cleaning Equipment Market Outlook
    • 6.3.3.1. Market Size & Forecast
      • 6.3.3.1.1. By Value
    • 6.3.3.2. Market Share & Forecast
      • 6.3.3.2.1. By Wafer Size
      • 6.3.3.2.2. By Functions
      • 6.3.3.2.3. By Application

7. Europe Wafer Cleaning Equipment Market Outlook

• 7.1. Market Size & Forecast
  • 7.1.1. By Value
• 7.2. Market Share & Forecast
  • 7.2.1. By Wafer Size
  • 7.2.2. By Functions
  • 7.2.3. By Application
  • 7.2.4. By Country
• 7.3. Europe: Country Analysis
  • 7.3.1. Germany Wafer Cleaning Equipment Market Outlook
    • 7.3.1.1. Market Size & Forecast
      • 7.3.1.1.1. By Value
    • 7.3.1.2. Market Share & Forecast
      • 7.3.1.2.1. By Wafer Size
      • 7.3.1.2.2. By Functions
      • 7.3.1.2.3. By Application
  • 7.3.2. France Wafer Cleaning Equipment Market Outlook
    • 7.3.2.1. Market Size & Forecast
      • 7.3.2.1.1. By Value
    • 7.3.2.2. Market Share & Forecast
      • 7.3.2.2.1. By Wafer Size
      • 7.3.2.2.2. By Functions
      • 7.3.2.2.3. By Application
  • 7.3.3. United Kingdom Wafer Cleaning Equipment Market Outlook
    • 7.3.3.1. Market Size & Forecast
      • 7.3.3.1.1. By Value
    • 7.3.3.2. Market Share & Forecast
      • 7.3.3.2.1. By Wafer Size
      • 7.3.3.2.2. By Functions
      • 7.3.3.2.3. By Application
  • 7.3.4. Italy Wafer Cleaning Equipment Market Outlook
    • 7.3.4.1. Market Size & Forecast
      • 7.3.4.1.1. By Value
    • 7.3.4.2. Market Share & Forecast
      • 7.3.4.2.1. By Wafer Size
      • 7.3.4.2.2. By Functions
      • 7.3.4.2.3. By Application
  • 7.3.5. Spain Wafer Cleaning Equipment Market Outlook
    • 7.3.5.1. Market Size & Forecast
      • 7.3.5.1.1. By Value
    • 7.3.5.2. Market Share & Forecast
      • 7.3.5.2.1. By Wafer Size
      • 7.3.5.2.2. By Functions
      • 7.3.5.2.3. By Application

8. Asia Pacific Wafer Cleaning Equipment Market Outlook

• 8.1. Market Size & Forecast
  • 8.1.1. By Value
• 8.2. Market Share & Forecast
  • 8.2.1. By Wafer Size
  • 8.2.2. By Functions
  • 8.2.3. By Application
  • 8.2.4. By Country
• 8.3. Asia Pacific: Country Analysis
  • 8.3.1. China Wafer Cleaning Equipment Market Outlook
    • 8.3.1.1. Market Size & Forecast
      • 8.3.1.1.1. By Value
    • 8.3.1.2. Market Share & Forecast
      • 8.3.1.2.1. By Wafer Size
      • 8.3.1.2.2. By Functions
      • 8.3.1.2.3. By Application
  • 8.3.2. India Wafer Cleaning Equipment Market Outlook
    • 8.3.2.1. Market Size & Forecast
      • 8.3.2.1.1. By Value
    • 8.3.2.2. Market Share & Forecast
      • 8.3.2.2.1. By Wafer Size
      • 8.3.2.2.2. By Functions
      • 8.3.2.2.3. By Application
  • 8.3.3. Japan Wafer Cleaning Equipment Market Outlook
    • 8.3.3.1. Market Size & Forecast
      • 8.3.3.1.1. By Value
    • 8.3.3.2. Market Share & Forecast
      • 8.3.3.2.1. By Wafer Size
      • 8.3.3.2.2. By Functions
      • 8.3.3.2.3. By Application
  • 8.3.4. South Korea Wafer Cleaning Equipment Market Outlook
    • 8.3.4.1. Market Size & Forecast
      • 8.3.4.1.1. By Value
    • 8.3.4.2. Market Share & Forecast
      • 8.3.4.2.1. By Wafer Size
      • 8.3.4.2.2. By Functions
      • 8.3.4.2.3. By Application
  • 8.3.5. Australia Wafer Cleaning Equipment Market Outlook
    • 8.3.5.1. Market Size & Forecast
      • 8.3.5.1.1. By Value
    • 8.3.5.2. Market Share & Forecast
      • 8.3.5.2.1. By Wafer Size
      • 8.3.5.2.2. By Functions
      • 8.3.5.2.3. By Application

9. Middle East & Africa Wafer Cleaning Equipment Market Outlook

• 9.1. Market Size & Forecast
  • 9.1.1. By Value
• 9.2. Market Share & Forecast
  • 9.2.1. By Wafer Size
  • 9.2.2. By Functions
  • 9.2.3. By Application
  • 9.2.4. By Country
• 9.3. Middle East & Africa: Country Analysis
  • 9.3.1. Saudi Arabia Wafer Cleaning Equipment Market Outlook
    • 9.3.1.1. Market Size & Forecast
      • 9.3.1.1.1. By Value
    • 9.3.1.2. Market Share & Forecast
      • 9.3.1.2.1. By Wafer Size
      • 9.3.1.2.2. By Functions
      • 9.3.1.2.3. By Application
  • 9.3.2. UAE Wafer Cleaning Equipment Market Outlook
    • 9.3.2.1. Market Size & Forecast
      • 9.3.2.1.1. By Value
    • 9.3.2.2. Market Share & Forecast
      • 9.3.2.2.1. By Wafer Size
      • 9.3.2.2.2. By Functions
      • 9.3.2.2.3. By Application
  • 9.3.3. South Africa Wafer Cleaning Equipment Market Outlook
    • 9.3.3.1. Market Size & Forecast
      • 9.3.3.1.1. By Value
    • 9.3.3.2. Market Share & Forecast
      • 9.3.3.2.1. By Wafer Size
      • 9.3.3.2.2. By Functions
      • 9.3.3.2.3. By Application

10. South America Wafer Cleaning Equipment Market Outlook

• 10.1. Market Size & Forecast
  • 10.1.1. By Value
• 10.2. Market Share & Forecast
  • 10.2.1. By Wafer Size
  • 10.2.2. By Functions
  • 10.2.3. By Application
  • 10.2.4. By Country
• 10.3. South America: Country Analysis
  • 10.3.1. Brazil Wafer Cleaning Equipment Market Outlook
    • 10.3.1.1. Market Size & Forecast
      • 10.3.1.1.1. By Value
    • 10.3.1.2. Market Share & Forecast
      • 10.3.1.2.1. By Wafer Size
      • 10.3.1.2.2. By Functions
      • 10.3.1.2.3. By Application
  • 10.3.2. Colombia Wafer Cleaning Equipment Market Outlook
    • 10.3.2.1. Market Size & Forecast
      • 10.3.2.1.1. By Value
    • 10.3.2.2. Market Share & Forecast
      • 10.3.2.2.1. By Wafer Size
      • 10.3.2.2.2. By Functions
      • 10.3.2.2.3. By Application
  • 10.3.3. Argentina Wafer Cleaning Equipment Market Outlook
    • 10.3.3.1. Market Size & Forecast
      • 10.3.3.1.1. By Value
    • 10.3.3.2. Market Share & Forecast
      • 10.3.3.2.1. By Wafer Size
      • 10.3.3.2.2. By Functions
      • 10.3.3.2.3. By Application

11. Market Dynamics

• 11.1. Drivers
• 11.2. Challenges

12. Market Trends & Developments

• 12.1. Merger & Acquisition (If Any)
• 12.2. Product Launches (If Any)
• 12.3. Recent Developments

13. Global Wafer Cleaning Equipment Market: SWOT Analysis

14. Porter's Five Forces Analysis

• 14.1. Competition in the Industry
• 14.2. Potential of New Entrants
• 14.3. Power of Suppliers
• 14.4. Power of Customers
• 14.5. Threat of Substitute Products

15. Competitive Landscape

• 15.1. Applied Materials, Inc.
  • 15.1.1. Business Overview
  • 15.1.2. Products & Services
  • 15.1.3. Recent Developments
  • 15.1.4. Key Personnel
  • 15.1.5. SWOT Analysis
• 15.2. Lam Research Corporation
• 15.3. SCREEN Holdings Co., Ltd.
• 15.4. Tokyo Electron Limited
• 15.5. Veeco Instruments Inc.
• 15.6. Modutek Corporation
• 15.7. ACM Research, Inc.
• 15.8. Entegris, Inc.
• 15.9. Shibaura Mechatronics Corporation
• 15.10. PVA TePla AG

16. Strategic Recommendations

17. About Us & Disclaimer