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市場調查報告書
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1873433

PVD 和 ALD 塗層在腔室部件中的應用：全球市場佔有率和排名、總收入和需求預測（2025-2031 年）

PVD and ALD Coating for Chamber Components - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031
出版日期: | 出版商: QYResearch | 英文 92 Pages | 商品交期: 2-3個工作天內

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2024 年全球用於腔室組件的 PVD ​​和 ALD 塗層市場規模估計為 5,370 萬美元，預計到 2031 年將達到 9,800 萬美元，在預測期（2025-2031 年）內以 9.2% 的複合年成長率成長。

用於腔室組件的PVD和ALD塗層通常基於氧化釔或氧化鋁，也可採用氮氧化鋁（AlON）製成。具體的化學成分和塗層厚度必須根據應用進行客製化。腔室的工作溫度、處理時間和氣體成分會因裝置規格的不同而顯著變化。這些變數用於選擇最適合所需塗層性能的塗層組合。客製化設計的精密塗層可在成本和性能之間實現最佳平衡。沉積腔室包含許多與裝置晶圓直接接觸或暴露於到達晶圓的製程化學品的組件。因此，材料選擇至關重要。電漿蝕刻腔室中使用的腐蝕性化學物質會侵蝕設備組件的表面並導致塗層劣化。長時間暴露於3D元件製造中常見的高溫等離子體會加速這種劣化。從腐蝕表面脫落的顆粒會沉積在晶圓上，可能導致裝置失效。等離子噴塗氧化釔或陽極氧化鋁組件長期以來一直是行業標準。儘管這些解決方案已應用多年，但先進製程節點的奈米級結構對系統內所有組件的潔淨度提出了更高的要求。採用傳統塗層的組件耐久性不足以承受蝕刻和沈積腔室中的惡劣環境，這可能會影響裝置產量比率。等離子噴塗塗層相對粗糙且多孔，而陽極氧化塗層則容易出現原位開裂和快速劣化。此外，沉積腔室內組件的複雜幾何形狀也對熱噴塗塗層提出了挑戰，因為熱噴塗塗層是針對平面最佳化的。精密工程特殊塗層採用與半導體晶圓加工相關的真空薄膜技術，以製造出具有卓越耐腐蝕性和抗氧化性的組件，從而劣化傳統塗層的分解。物理沉澱沉積 (PVD) 和原子層沉積 (ALD) 是兩種可行的選擇。任何精密工程塗層都必須在腐蝕性等離子體和化學環境中提供最小的磨損和耐腐蝕性，同時確保完全附著和均勻的表面覆蓋。最佳塗層化學成分和方法取決於待塗覆零件的幾何形狀和材質、腔室類型以及加工條件。

全球主要企業包括Entegris、KoMiCo和Inficon。前三大公司佔了約50%的市場。亞太地區是最大的市場，市佔率約58%，其次是北美（35%）和歐洲（7%）。依塗層方法分類，PVD塗層是最大的細分市場，市場佔有率為65%。依應用領域分類，蝕刻工具是最大的應用領域，市佔率約86%。

本報告旨在對全球腔室零件用 PVD ​​和 ALD 塗層市場依地區/國家、塗層方法和應用進行全面分析，重點關注總收入、市場佔有率和主要企業的排名。

本報告以2024年為基準年，提供PVD和ALD塗層在腔室零件市場規模、估算和預測的銷售收入數據，並涵蓋2020年至2031年的歷史數據和預測數據。定量和定性分析將幫助讀者制定業務和成長策略，評估市場競爭，分析自身在當前市場中的地位，並就PVD和ALD塗層在腔室零件市場做出明智的商業決策。

市場區隔

公司

  • TOCALO Co., Ltd.
  • KoMiCo
  • Cinos
  • WONIK QnC
  • Oerlikon Balzers
  • Beneq
  • Entegris
  • Inficon

塗層法

  • PVD塗層法
  • ALD塗層方法

應用領域

  • 蝕刻設備
  • 薄膜成型設備

依地區

  • 北美洲
    • 美國
    • 加拿大
  • 亞太地區
    • 中國
    • 日本
    • 韓國
    • 東南亞
    • 印度
    • 澳洲
    • 亞太其他地區
  • 歐洲
    • 德國
    • 法國
    • 英國
    • 義大利
    • 荷蘭
    • 北歐國家
    • 其他歐洲
  • 拉丁美洲
    • 墨西哥
    • 巴西
    • 其他拉丁美洲
  • 中東和非洲
    • 土耳其
    • 沙烏地阿拉伯
    • 阿拉伯聯合大公國
    • 其他中東和非洲地區

The global market for PVD and ALD Coating for Chamber Components was estimated to be worth US$ 53.7 million in 2024 and is forecast to a readjusted size of US$ 98 million by 2031 with a CAGR of 9.2% during the forecast period 2025-2031.

PVD and ALD coatings for chamber components are typically based on yttrium or aluminum oxides or may be made from aluminum oxynitride (AlON). The exact chemistry and coating thickness must be tailored to the application. The use of temperature in the chamber, processing time, and gases vary considerably depending on the device specifications, and these variables are used to select the right combination of coatings for their desired coating performance. Custom precision-engineered coatings provide the optimal balance between cost and performance. Deposition chambers contain various parts and components that either contact the device wafer directly or are exposed to process chemicals that subsequently reach the wafer. As such, material selection is critical. The corrosive chemicals used in plasma-etch chambers attack the tool component surfaces and degrade coatings. Longer exposure to hotter plasmas, which is common for 3D device processing, accelerates degradation. Particles shed from the corroded surfaces then deposit on the wafers, potentially causing device failure. Components protected with yttrium oxide deposited by plasma spray-coating or made from anodized aluminum have long been the industry norm. Although such solutions have worked for many years, the nano-scale features of advanced process nodes demand an increased level of cleanliness for every part in the system. Conventionally coated components are not rugged enough to withstand the aggressive environments inside etch and deposition chambers without impacting device yield. Plasma spray coatings are relatively rough and porous, while anodized coatings exhibit in-situ cracking that makes them degrade too readily. The complex shapes of parts inside deposition chambers also pose a challenge for spray coating, which works best when coating planar surfaces. Precision engineered, specialized coatings borrow vacuum thin film technologies associated with semiconductor wafer processing to produce coated components that can better resist the corrosion and oxidation that degrade conventional coatings. Two options are available: physical vapor deposition (PVD) and atomic layer deposition (ALD). Every precision engineered coating must exhibit a minimum level of wear and corrosion resistance in the presence of corrosive plasma/chemistry and adhere fully to the underlying substrate to create a uniformly coated surface. The geometry and material of the part being coated, the type of chamber, and the processing conditions further dictate the optimal coating chemistry and method.

Global key players of PVD and ALD Coating for Chamber Components include Entegris, KoMiCo, Inficon, etc. The top three players hold a share about 50%. Asia-Pacific is the largest market, and has a share about 58%, followed by North America and Europe with share 35% and 7%, separately. In terms of Coating Method, PVD Coating Method is the largest segment, accounting for a share of 65%. In terms of application, Etching Tools is the largest field with a share about 86 percent.

This report aims to provide a comprehensive presentation of the global market for PVD and ALD Coating for Chamber Components, focusing on the total sales revenue, key companies market share and ranking, together with an analysis of PVD and ALD Coating for Chamber Components by region & country, by Coating Method, and by Application.

The PVD and ALD Coating for Chamber Components market size, estimations, and forecasts are provided in terms of sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding PVD and ALD Coating for Chamber Components.

Market Segmentation

By Company

  • TOCALO Co., Ltd.
  • KoMiCo
  • Cinos
  • WONIK QnC
  • Oerlikon Balzers
  • Beneq
  • Entegris
  • Inficon

Segment by Coating Method

  • PVD Coating Method
  • ALD Coating Method

Segment by Application

  • Etching Tools
  • Deposition Tools

By Region

  • North America
    • United States
    • Canada
  • Asia-Pacific
    • China
    • Japan
    • South Korea
    • Southeast Asia
    • India
    • Australia
    • Rest of Asia-Pacific
  • Europe
    • Germany
    • France
    • U.K.
    • Italy
    • Netherlands
    • Nordic Countries
    • Rest of Europe
  • Latin America
    • Mexico
    • Brazil
    • Rest of Latin America
  • Middle East & Africa
    • Turkey
    • Saudi Arabia
    • UAE
    • Rest of MEA

Chapter Outline

Chapter 1: Introduces the report scope of the report, global total market size. This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.

Chapter 2: Detailed analysis of PVD and ALD Coating for Chamber Components company competitive landscape, revenue market share, latest development plan, merger, and acquisition information, etc.

Chapter 3: Provides the analysis of various market segments by Coating Method, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.

Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.

Chapter 5: Revenue of PVD and ALD Coating for Chamber Components in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.

Chapter 6: Revenue of PVD and ALD Coating for Chamber Components in country level. It provides sigmate data by Coating Method, and by Application for each country/region.

Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product revenue, gross margin, product introduction, recent development, etc.

Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.

Chapter 9: Conclusion.

Table of Contents

1 Market Overview

  • 1.1 PVD and ALD Coating for Chamber Components Product Introduction
  • 1.2 Global PVD and ALD Coating for Chamber Components Market Size Forecast (2020-2031)
  • 1.3 PVD and ALD Coating for Chamber Components Market Trends & Drivers
    • 1.3.1 PVD and ALD Coating for Chamber Components Industry Trends
    • 1.3.2 PVD and ALD Coating for Chamber Components Market Drivers & Opportunity
    • 1.3.3 PVD and ALD Coating for Chamber Components Market Challenges
    • 1.3.4 PVD and ALD Coating for Chamber Components Market Restraints
  • 1.4 Assumptions and Limitations
  • 1.5 Study Objectives
  • 1.6 Years Considered

2 Competitive Analysis by Company

  • 2.1 Global PVD and ALD Coating for Chamber Components Players Revenue Ranking (2024)
  • 2.2 Global PVD and ALD Coating for Chamber Components Revenue by Company (2020-2025)
  • 2.3 Key Companies PVD and ALD Coating for Chamber Components Manufacturing Base Distribution and Headquarters
  • 2.4 Key Companies PVD and ALD Coating for Chamber Components Product Offered
  • 2.5 Key Companies Time to Begin Mass Production of PVD and ALD Coating for Chamber Components
  • 2.6 PVD and ALD Coating for Chamber Components Market Competitive Analysis
    • 2.6.1 PVD and ALD Coating for Chamber Components Market Concentration Rate (2020-2025)
    • 2.6.2 Global 5 and 10 Largest Companies by PVD and ALD Coating for Chamber Components Revenue in 2024
    • 2.6.3 Global Top Companies by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in PVD and ALD Coating for Chamber Components as of 2024)
  • 2.7 Mergers & Acquisitions, Expansion

3 Segmentation by Coating Method

  • 3.1 Introduction by Coating Method
    • 3.1.1 PVD Coating Method
    • 3.1.2 ALD Coating Method
  • 3.2 Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method
    • 3.2.1 Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020 VS 2024 VS 2031)
    • 3.2.2 Global PVD and ALD Coating for Chamber Components Sales Value, by Coating Method (2020-2031)
    • 3.2.3 Global PVD and ALD Coating for Chamber Components Sales Value, by Coating Method (%) (2020-2031)

4 Segmentation by Application

  • 4.1 Introduction by Application
    • 4.1.1 Etching Tools
    • 4.1.2 Deposition Tools
  • 4.2 Global PVD and ALD Coating for Chamber Components Sales Value by Application
    • 4.2.1 Global PVD and ALD Coating for Chamber Components Sales Value by Application (2020 VS 2024 VS 2031)
    • 4.2.2 Global PVD and ALD Coating for Chamber Components Sales Value, by Application (2020-2031)
    • 4.2.3 Global PVD and ALD Coating for Chamber Components Sales Value, by Application (%) (2020-2031)

5 Segmentation by Region

  • 5.1 Global PVD and ALD Coating for Chamber Components Sales Value by Region
    • 5.1.1 Global PVD and ALD Coating for Chamber Components Sales Value by Region: 2020 VS 2024 VS 2031
    • 5.1.2 Global PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025)
    • 5.1.3 Global PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031)
    • 5.1.4 Global PVD and ALD Coating for Chamber Components Sales Value by Region (%), (2020-2031)
  • 5.2 North America
    • 5.2.1 North America PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.2.2 North America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • 5.3 Europe
    • 5.3.1 Europe PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.3.2 Europe PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • 5.4 Asia Pacific
    • 5.4.1 Asia Pacific PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.4.2 Asia Pacific PVD and ALD Coating for Chamber Components Sales Value by Region (%), 2024 VS 2031
  • 5.5 South America
    • 5.5.1 South America PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.5.2 South America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • 5.6 Middle East & Africa
    • 5.6.1 Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.6.2 Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031

6 Segmentation by Key Countries/Regions

  • 6.1 Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value Growth Trends, 2020 VS 2024 VS 2031
  • 6.2 Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
  • 6.3 United States
    • 6.3.1 United States PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.3.2 United States PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.3.3 United States PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.4 Europe
    • 6.4.1 Europe PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.4.2 Europe PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.4.3 Europe PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.5 China
    • 6.5.1 China PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.5.2 China PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.5.3 China PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.6 Japan
    • 6.6.1 Japan PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.6.2 Japan PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.6.3 Japan PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.7 South Korea
    • 6.7.1 South Korea PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.7.2 South Korea PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.7.3 South Korea PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.8 Southeast Asia
    • 6.8.1 Southeast Asia PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.8.2 Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.8.3 Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.9 India
    • 6.9.1 India PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.9.2 India PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.9.3 India PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031

7 Company Profiles

  • 7.1 TOCALO Co., Ltd.
    • 7.1.1 TOCALO Co., Ltd. Profile
    • 7.1.2 TOCALO Co., Ltd. Main Business
    • 7.1.3 TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.1.4 TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.1.5 TOCALO Co., Ltd. Recent Developments
  • 7.2 KoMiCo
    • 7.2.1 KoMiCo Profile
    • 7.2.2 KoMiCo Main Business
    • 7.2.3 KoMiCo PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.2.4 KoMiCo PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.2.5 KoMiCo Recent Developments
  • 7.3 Cinos
    • 7.3.1 Cinos Profile
    • 7.3.2 Cinos Main Business
    • 7.3.3 Cinos PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.3.4 Cinos PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.3.5 Cinos Recent Developments
  • 7.4 WONIK QnC
    • 7.4.1 WONIK QnC Profile
    • 7.4.2 WONIK QnC Main Business
    • 7.4.3 WONIK QnC PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.4.4 WONIK QnC PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.4.5 WONIK QnC Recent Developments
  • 7.5 Oerlikon Balzers
    • 7.5.1 Oerlikon Balzers Profile
    • 7.5.2 Oerlikon Balzers Main Business
    • 7.5.3 Oerlikon Balzers PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.5.4 Oerlikon Balzers PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.5.5 Oerlikon Balzers Recent Developments
  • 7.6 Beneq
    • 7.6.1 Beneq Profile
    • 7.6.2 Beneq Main Business
    • 7.6.3 Beneq PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.6.4 Beneq PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.6.5 Beneq Recent Developments
  • 7.7 Entegris
    • 7.7.1 Entegris Profile
    • 7.7.2 Entegris Main Business
    • 7.7.3 Entegris PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.7.4 Entegris PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.7.5 Entegris Recent Developments
  • 7.8 Inficon
    • 7.8.1 Inficon Profile
    • 7.8.2 Inficon Main Business
    • 7.8.3 Inficon PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.8.4 Inficon PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.8.5 Inficon Recent Developments

8 Industry Chain Analysis

  • 8.1 PVD and ALD Coating for Chamber Components Industrial Chain
  • 8.2 PVD and ALD Coating for Chamber Components Upstream Analysis
    • 8.2.1 Key Raw Materials
    • 8.2.2 Raw Materials Key Suppliers
    • 8.2.3 Manufacturing Cost Structure
  • 8.3 Midstream Analysis
  • 8.4 Downstream Analysis (Customers Analysis)
  • 8.5 Sales Model and Sales Channels
    • 8.5.1 PVD and ALD Coating for Chamber Components Sales Model
    • 8.5.2 Sales Channel
    • 8.5.3 PVD and ALD Coating for Chamber Components Distributors

9 Research Findings and Conclusion

10 Appendix

  • 10.1 Research Methodology
    • 10.1.1 Methodology/Research Approach
      • 10.1.1.1 Research Programs/Design
      • 10.1.1.2 Market Size Estimation
      • 10.1.1.3 Market Breakdown and Data Triangulation
    • 10.1.2 Data Source
      • 10.1.2.1 Secondary Sources
      • 10.1.2.2 Primary Sources
  • 10.2 Author Details
  • 10.3 Disclaimer

List of Tables

  • Table 1. PVD and ALD Coating for Chamber Components Market Trends
  • Table 2. PVD and ALD Coating for Chamber Components Market Drivers & Opportunity
  • Table 3. PVD and ALD Coating for Chamber Components Market Challenges
  • Table 4. PVD and ALD Coating for Chamber Components Market Restraints
  • Table 5. Global PVD and ALD Coating for Chamber Components Revenue by Company (2020-2025) & (US$ Million)
  • Table 6. Global PVD and ALD Coating for Chamber Components Revenue Market Share by Company (2020-2025)
  • Table 7. Key Companies PVD and ALD Coating for Chamber Components Manufacturing Base Distribution and Headquarters
  • Table 8. Key Companies PVD and ALD Coating for Chamber Components Product Type
  • Table 9. Key Companies Time to Begin Mass Production of PVD and ALD Coating for Chamber Components
  • Table 10. Global PVD and ALD Coating for Chamber Components Companies Market Concentration Ratio (CR5 and HHI)
  • Table 11. Global Top Companies by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in PVD and ALD Coating for Chamber Components as of 2024)
  • Table 12. Mergers & Acquisitions, Expansion Plans
  • Table 13. Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method: 2020 VS 2024 VS 2031 (US$ Million)
  • Table 14. Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020-2025) & (US$ Million)
  • Table 15. Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2026-2031) & (US$ Million)
  • Table 16. Global PVD and ALD Coating for Chamber Components Sales Market Share in Value by Coating Method (2020-2025)
  • Table 17. Global PVD and ALD Coating for Chamber Components Sales Market Share in Value by Coating Method (2026-2031)
  • Table 18. Global PVD and ALD Coating for Chamber Components Sales Value by Application: 2020 VS 2024 VS 2031 (US$ Million)
  • Table 19. Global PVD and ALD Coating for Chamber Components Sales Value by Application (2020-2025) & (US$ Million)
  • Table 20. Global PVD and ALD Coating for Chamber Components Sales Value by Application (2026-2031) & (US$ Million)
  • Table 21. Global PVD and ALD Coating for Chamber Components Sales Market Share in Value by Application (2020-2025)
  • Table 22. Global PVD and ALD Coating for Chamber Components Sales Market Share in Value by Application (2026-2031)
  • Table 23. Global PVD and ALD Coating for Chamber Components Sales Value by Region, (2020 VS 2024 VS 2031) & (US$ Million)
  • Table 24. Global PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025) & (US$ Million)
  • Table 25. Global PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031) & (US$ Million)
  • Table 26. Global PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025) & (%)
  • Table 27. Global PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031) & (%)
  • Table 28. Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value Growth Trends, (US$ Million): 2020 VS 2024 VS 2031
  • Table 29. Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value, (2020-2025) & (US$ Million)
  • Table 30. Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value, (2026-2031) & (US$ Million)
  • Table 31. TOCALO Co., Ltd. Basic Information List
  • Table 32. TOCALO Co., Ltd. Description and Business Overview
  • Table 33. TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 34. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of TOCALO Co., Ltd. (2020-2025)
  • Table 35. TOCALO Co., Ltd. Recent Developments
  • Table 36. KoMiCo Basic Information List
  • Table 37. KoMiCo Description and Business Overview
  • Table 38. KoMiCo PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 39. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of KoMiCo (2020-2025)
  • Table 40. KoMiCo Recent Developments
  • Table 41. Cinos Basic Information List
  • Table 42. Cinos Description and Business Overview
  • Table 43. Cinos PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 44. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Cinos (2020-2025)
  • Table 45. Cinos Recent Developments
  • Table 46. WONIK QnC Basic Information List
  • Table 47. WONIK QnC Description and Business Overview
  • Table 48. WONIK QnC PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 49. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of WONIK QnC (2020-2025)
  • Table 50. WONIK QnC Recent Developments
  • Table 51. Oerlikon Balzers Basic Information List
  • Table 52. Oerlikon Balzers Description and Business Overview
  • Table 53. Oerlikon Balzers PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 54. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Oerlikon Balzers (2020-2025)
  • Table 55. Oerlikon Balzers Recent Developments
  • Table 56. Beneq Basic Information List
  • Table 57. Beneq Description and Business Overview
  • Table 58. Beneq PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 59. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Beneq (2020-2025)
  • Table 60. Beneq Recent Developments
  • Table 61. Entegris Basic Information List
  • Table 62. Entegris Description and Business Overview
  • Table 63. Entegris PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 64. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Entegris (2020-2025)
  • Table 65. Entegris Recent Developments
  • Table 66. Inficon Basic Information List
  • Table 67. Inficon Description and Business Overview
  • Table 68. Inficon PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 69. Revenue (US$ Million) in PVD and ALD Coating for Chamber Components Business of Inficon (2020-2025)
  • Table 70. Inficon Recent Developments
  • Table 71. Key Raw Materials Lists
  • Table 72. Raw Materials Key Suppliers Lists
  • Table 73. PVD and ALD Coating for Chamber Components Downstream Customers
  • Table 74. PVD and ALD Coating for Chamber Components Distributors List
  • Table 75. Research Programs/Design for This Report
  • Table 76. Key Data Information from Secondary Sources
  • Table 77. Key Data Information from Primary Sources

List of Figures

  • Figure 1. PVD and ALD Coating for Chamber Components Product Picture
  • Figure 2. Global PVD and ALD Coating for Chamber Components Sales Value, 2020 VS 2024 VS 2031 (US$ Million)
  • Figure 3. Global PVD and ALD Coating for Chamber Components Sales Value (2020-2031) & (US$ Million)
  • Figure 4. PVD and ALD Coating for Chamber Components Report Years Considered
  • Figure 5. Global PVD and ALD Coating for Chamber Components Players Revenue Ranking (2024) & (US$ Million)
  • Figure 6. The 5 and 10 Largest Companies in the World: Market Share by PVD and ALD Coating for Chamber Components Revenue in 2024
  • Figure 7. PVD and ALD Coating for Chamber Components Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
  • Figure 8. PVD Coating Method Picture
  • Figure 9. ALD Coating Method Picture
  • Figure 10. Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020 VS 2024 VS 2031) & (US$ Million)
  • Figure 11. Global PVD and ALD Coating for Chamber Components Sales Value Market Share by Coating Method, 2024 & 2031
  • Figure 12. Product Picture of Etching Tools
  • Figure 13. Product Picture of Deposition Tools
  • Figure 14. Global PVD and ALD Coating for Chamber Components Sales Value by Application (2020 VS 2024 VS 2031) & (US$ Million)
  • Figure 15. Global PVD and ALD Coating for Chamber Components Sales Value Market Share by Application, 2024 & 2031
  • Figure 16. North America PVD and ALD Coating for Chamber Components Sales Value (2020-2031) & (US$ Million)
  • Figure 17. North America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 18. Europe PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 19. Europe PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 20. Asia Pacific PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 21. Asia Pacific PVD and ALD Coating for Chamber Components Sales Value by Region (%), 2024 VS 2031
  • Figure 22. South America PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 23. South America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 24. Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 25. Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 26. Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value (%), (2020-2031)
  • Figure 27. United States PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 28. United States PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 29. United States PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 30. Europe PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 31. Europe PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 32. Europe PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 33. China PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 34. China PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 35. China PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 36. Japan PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 37. Japan PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 38. Japan PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 39. South Korea PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 40. South Korea PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 41. South Korea PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 42. Southeast Asia PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 43. Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 44. Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 45. India PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 46. India PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 47. India PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 48. PVD and ALD Coating for Chamber Components Industrial Chain
  • Figure 49. PVD and ALD Coating for Chamber Components Manufacturing Cost Structure
  • Figure 50. Channels of Distribution (Direct Sales, and Distribution)
  • Figure 51. Bottom-up and Top-down Approaches for This Report
  • Figure 52. Data Triangulation
  • Figure 53. Key Executives Interviewed