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1862397

化學氣相沉積 (CVD)、物理氣相沉積 (PVD) 和原子層沉積 (ALD) 塗層在腔室零件中的應用：全球市場佔有率和排名、總收入和需求預測（2025-2031 年）

CVD, PVD and ALD Coating for Chamber Components - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031
出版日期: | 出版商: QYResearch | 英文 92 Pages | 商品交期: 2-3個工作天內

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2024 年全球用於腔室組件的 CVD、PVD 和 ALD 塗層市場規模估計為 5,800 萬美元，預計到 2031 年將達到 1.13 億美元，在預測期（2025-2031 年）內以 9.7% 的複合年成長率成長。

用於腔室組件的物理氣相沉積 (PVD) 和原子層沉積 (ALD) 塗層通常以氧化釔或氧化鋁為基礎，也可採用氮氧化鋁 (AlON) 製成。塗層的具體化學成分和厚度必須根據應用進行客製化。工作溫度、處理時間和腔室內的氣體成分會因設備規格的不同而有很大差異，這些變數用於選擇合適的塗層組合以實現所需的塗層性能。客製化設計的精密塗層可在成本和性能之間實現最佳平衡。

沉積腔包含許多組件，其中一些組件與裝置晶圓直接接觸，一些組件暴露於到達晶圓的製程化學品中，因此材料選擇極為重要。

電漿蝕刻腔體中使用的腐蝕性化學物質會侵蝕元件組件表面並劣化塗層。長時間暴露於3D裝置製造中常見的高溫等離子體中會加速這種劣化。從被侵蝕表面脫落的顆粒會沉積在晶圓上，導致裝置失效。

多年來，氧化釔等離子噴塗或陽極氧化鋁塗層一直是業界標準。雖然這些方案多年來行之有效，但先進製程節點的奈米級結構對系統內所有組件的潔淨度提出了更高的要求。傳統塗層組件的耐久性不足以承受蝕刻和沈積腔室中的嚴苛環境，且會影響裝置產量比率。等離子噴塗塗層相對粗糙且多孔，而陽極氧化塗層則容易出現原位開裂且劣化速度過快。此外，沉積腔室內組件的複雜幾何形狀使得熱噴塗難以處理，因為熱噴塗更適用於平面。

我們採用與半導體晶圓加工相關的真空薄膜技術，精密設計出具有卓越耐腐蝕性和抗氧化性的特種塗層，而傳統塗層則劣化這些因素的影響。我們提供兩種塗層選擇：物理氣相沉積 (PVD) 和原子層沉積 (ALD)。

任何精密設計的塗層都必須在腐蝕性等離子體/化學環境中表現出最低限度的耐磨性和耐腐蝕性，與基材完全結合，並形成均勻的塗層表面。待塗覆零件的幾何形狀和材質、腔室類型以及加工條件進一步決定了最佳的塗層化學成分和方法。

多年來，氧化釔等離子噴塗或陽極氧化鋁塗層一直是業界標準。雖然這些方案多年來行之有效，但先進製程節點的奈米級特性對系統內所有組件的潔淨度提出了更高的要求。採用傳統塗層的組件耐久性不足以承受蝕刻和沈積腔室內的嚴苛環境，這可能會影響裝置產量比率。等離子噴塗塗層相對粗糙且多孔，而陽極氧化塗層因原位開裂而劣化過快。此外，沉積腔室內組件的複雜幾何形狀也為熱噴塗塗層帶來了挑戰，因為熱噴塗塗層最適合塗覆平面。

用於腔室組件的 CVD、PVD 和 ALD 塗層通常以氧化釔或氧化鋁為基礎，或採用氮氧化鋁 (AlON) 製成。塗層的具體化學成分和厚度必須根據應用進行客製化。工作溫度、處理時間和腔室內的氣體成分會因裝置規格的不同而有很大差異，這些變數用於選擇最符合所需塗層性能的塗層組合。客製化設計的精密塗層可在成本和性能之間實現最佳平衡。

全球用於腔室零件的CVD、PVD和ALD塗層市場由美國、日本、韓國和歐洲的公司主導。主要企業包括Entegris、Comico、Inficon、Synos​​、Tokaro Co., Ltd.和Oerlikon Balzers。預計到2024年，前五大公司將佔據超過67%的市場。

本報告旨在對全球 CVD、PVD 和 ALD 塗層市場（用於腔室組件）按地區/國家、塗層方法和應用進行全面分析，重點關注總收入、市場佔有率和主要企業的排名。

本報告以2024年為基準年，按銷售收入對用於腔室部件的CVD、PVD和ALD塗層市場規模、估算和預測進行了闡述，並涵蓋了2020年至2031年的歷史數據和預測數據。定量和定性分析將幫助讀者制定業務和成長策略，評估市場競爭，分析自身在當前市場中的地位，並就用於腔室部件的CVD、PVD和ALD塗層做出明智的商業決策。

市場區隔

公司

  • TOCALO Co., Ltd.
  • KoMiCo
  • Cinos
  • WONIK QnC
  • Oerlikon Balzers
  • Beneq
  • Entegris
  • Inficon
  • SilcoTek

塗層法

  • PVD塗層法
  • ALD塗層方法
  • 化學氣相沉積塗層法

應用領域

  • 蝕刻設備
  • 薄膜成型設備

按地區

  • 北美洲
    • 美國
    • 加拿大
  • 亞太地區
    • 中國
    • 日本
    • 韓國
    • 東南亞
    • 印度
    • 澳洲
    • 亞太其他地區
  • 歐洲
    • 德國
    • 法國
    • 英國
    • 義大利
    • 荷蘭
    • 北歐國家
    • 其他歐洲
  • 拉丁美洲
    • 墨西哥
    • 巴西
    • 其他拉丁美洲
  • 中東和非洲
    • 土耳其
    • 沙烏地阿拉伯
    • 阿拉伯聯合大公國
    • 其他中東和非洲地區

The global market for CVD, PVD and ALD Coating for Chamber Components was estimated to be worth US$ 58.00 million in 2024 and is forecast to a readjusted size of US$ 113 million by 2031 with a CAGR of 9.7% during the forecast period 2025-2031.

PVD and ALD coatings for chamber components are typically based on yttrium or aluminum oxides or may be made from aluminum oxynitride (AlON). The exact chemistry and coating thickness must be tailored to the application. The use of temperature in the chamber, processing time, and gases vary considerably depending on the device specifications, and these variables are used to select the right combination of coatings for their desired coating performance. Custom precision-engineered coatings provide the optimal balance between cost and performance.

Deposition chambers contain various parts and components that either contact the device wafer directly or are exposed to process chemicals that subsequently reach the wafer. As such, material selection is critical.

The corrosive chemicals used in plasma-etch chambers attack the tool component surfaces and degrade coatings. Longer exposure to hotter plasmas, which is common for 3D device processing, accelerates degradation. Particles shed from the corroded surfaces then deposit on the wafers, potentially causing device failure.

Components protected with yttrium oxide deposited by plasma spray-coating or made from anodized aluminum have long been the industry norm. Although such solutions have worked for many years, the nano-scale features of advanced process nodes demand an increased level of cleanliness for every part in the system. Conventionally coated components are not rugged enough to withstand the aggressive environments inside etch and deposition chambers without impacting device yield. Plasma spray coatings are relatively rough and porous, while anodized coatings exhibit in-situ cracking that makes them degrade too readily. The complex shapes of parts inside deposition chambers also pose a challenge for spray coating, which works best when coating planar surfaces.

Precision engineered, specialized coatings borrow vacuum thin film technologies associated with semiconductor wafer processing to produce coated components that can better resist the corrosion and oxidation that degrade conventional coatings. Two options are available: physical vapor deposition (PVD) and atomic layer deposition (ALD).

Every precision engineered coating must exhibit a minimum level of wear and corrosion resistance in the presence of corrosive plasma/chemistry and adhere fully to the underlying substrate to create a uniformly coated surface. The geometry and material of the part being coated, the type of chamber, and the processing conditions further dictate the optimal coating chemistry and method.

Components protected with yttrium oxide deposited by plasma spray-coating or made from anodized aluminum have long been the industry norm. Although such solutions have worked for many years, the nano-scale features of advanced process nodes demand an increased level of cleanliness for every part in the system. Conventionally coated components are not rugged enough to withstand the aggressive environments inside etch and deposition chambers without impacting device yield. Plasma spray coatings are relatively rough and porous, while anodized coatings exhibit in-situ cracking that makes them degrade too readily. The complex shapes of parts inside deposition chambers also pose a challenge for spray coating, which works best when coating planar surfaces.

CVD, PVD and ALD coatings for chamber components are typically based on yttrium or aluminum oxides or may be made from aluminum oxynitride (AlON). The exact chemistry and coating thickness must be tailored to the application. The use of temperature in the chamber, processing time, and gases vary considerably depending on the device specifications, and these variables are used to select the right combination of coatings for their desired coating performance. Custom precision-engineered coatings provide the optimal balance between cost and performance.

The global CVD, PVD and ALD coating for chamber components market is dominated by companies from USA, Japan, South Korea, and Europe. Key companies include Entegris, KoMiCo, Inficon, Cinos, TOCALO Co., Ltd. and Oerlikon Balzers, etc.. Top five players occupy for over 67% market share in 2024.

This report aims to provide a comprehensive presentation of the global market for CVD, PVD and ALD Coating for Chamber Components, focusing on the total sales revenue, key companies market share and ranking, together with an analysis of CVD, PVD and ALD Coating for Chamber Components by region & country, by Coating Method, and by Application.

The CVD, PVD and ALD Coating for Chamber Components market size, estimations, and forecasts are provided in terms of sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding CVD, PVD and ALD Coating for Chamber Components.

Market Segmentation

By Company

  • TOCALO Co., Ltd.
  • KoMiCo
  • Cinos
  • WONIK QnC
  • Oerlikon Balzers
  • Beneq
  • Entegris
  • Inficon
  • SilcoTek

Segment by Coating Method

  • PVD Coating Method
  • ALD Coating Method
  • CVD Coating Method

Segment by Application

  • Etching Tools
  • Deposition Tools

By Region

  • North America
    • United States
    • Canada
  • Asia-Pacific
    • China
    • Japan
    • South Korea
    • Southeast Asia
    • India
    • Australia
    • Rest of Asia-Pacific
  • Europe
    • Germany
    • France
    • U.K.
    • Italy
    • Netherlands
    • Nordic Countries
    • Rest of Europe
  • Latin America
    • Mexico
    • Brazil
    • Rest of Latin America
  • Middle East & Africa
    • Turkey
    • Saudi Arabia
    • UAE
    • Rest of MEA

Chapter Outline

Chapter 1: Introduces the report scope of the report, global total market size. This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.

Chapter 2: Detailed analysis of CVD, PVD and ALD Coating for Chamber Components company competitive landscape, revenue market share, latest development plan, merger, and acquisition information, etc.

Chapter 3: Provides the analysis of various market segments by Coating Method, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.

Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.

Chapter 5: Revenue of CVD, PVD and ALD Coating for Chamber Components in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.

Chapter 6: Revenue of CVD, PVD and ALD Coating for Chamber Components in country level. It provides sigmate data by Coating Method, and by Application for each country/region.

Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product revenue, gross margin, product introduction, recent development, etc.

Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.

Chapter 9: Conclusion.

Table of Contents

1 Market Overview

  • 1.1 CVD, PVD and ALD Coating for Chamber Components Product Introduction
  • 1.2 Global CVD, PVD and ALD Coating for Chamber Components Market Size Forecast (2020-2031)
  • 1.3 CVD, PVD and ALD Coating for Chamber Components Market Trends & Drivers
    • 1.3.1 CVD, PVD and ALD Coating for Chamber Components Industry Trends
    • 1.3.2 CVD, PVD and ALD Coating for Chamber Components Market Drivers & Opportunity
    • 1.3.3 CVD, PVD and ALD Coating for Chamber Components Market Challenges
    • 1.3.4 CVD, PVD and ALD Coating for Chamber Components Market Restraints
  • 1.4 Assumptions and Limitations
  • 1.5 Study Objectives
  • 1.6 Years Considered

2 Competitive Analysis by Company

  • 2.1 Global CVD, PVD and ALD Coating for Chamber Components Players Revenue Ranking (2024)
  • 2.2 Global CVD, PVD and ALD Coating for Chamber Components Revenue by Company (2020-2025)
  • 2.3 Key Companies CVD, PVD and ALD Coating for Chamber Components Manufacturing Base Distribution and Headquarters
  • 2.4 Key Companies CVD, PVD and ALD Coating for Chamber Components Product Offered
  • 2.5 Key Companies Time to Begin Mass Production of CVD, PVD and ALD Coating for Chamber Components
  • 2.6 CVD, PVD and ALD Coating for Chamber Components Market Competitive Analysis
    • 2.6.1 CVD, PVD and ALD Coating for Chamber Components Market Concentration Rate (2020-2025)
    • 2.6.2 Global 5 and 10 Largest Companies by CVD, PVD and ALD Coating for Chamber Components Revenue in 2024
    • 2.6.3 Global Top Companies by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in CVD, PVD and ALD Coating for Chamber Components as of 2024)
  • 2.7 Mergers & Acquisitions, Expansion

3 Segmentation by Coating Method

  • 3.1 Introduction by Coating Method
    • 3.1.1 PVD Coating Method
    • 3.1.2 ALD Coating Method
    • 3.1.3 CVD Coating Method
  • 3.2 Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method
    • 3.2.1 Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020 VS 2024 VS 2031)
    • 3.2.2 Global CVD, PVD and ALD Coating for Chamber Components Sales Value, by Coating Method (2020-2031)
    • 3.2.3 Global CVD, PVD and ALD Coating for Chamber Components Sales Value, by Coating Method (%) (2020-2031)

4 Segmentation by Application

  • 4.1 Introduction by Application
    • 4.1.1 Etching Tools
    • 4.1.2 Deposition Tools
  • 4.2 Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Application
    • 4.2.1 Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (2020 VS 2024 VS 2031)
    • 4.2.2 Global CVD, PVD and ALD Coating for Chamber Components Sales Value, by Application (2020-2031)
    • 4.2.3 Global CVD, PVD and ALD Coating for Chamber Components Sales Value, by Application (%) (2020-2031)

5 Segmentation by Region

  • 5.1 Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region
    • 5.1.1 Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region: 2020 VS 2024 VS 2031
    • 5.1.2 Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025)
    • 5.1.3 Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031)
    • 5.1.4 Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region (%), (2020-2031)
  • 5.2 North America
    • 5.2.1 North America CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.2.2 North America CVD, PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • 5.3 Europe
    • 5.3.1 Europe CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.3.2 Europe CVD, PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • 5.4 Asia Pacific
    • 5.4.1 Asia Pacific CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.4.2 Asia Pacific CVD, PVD and ALD Coating for Chamber Components Sales Value by Region (%), 2024 VS 2031
  • 5.5 South America
    • 5.5.1 South America CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.5.2 South America CVD, PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • 5.6 Middle East & Africa
    • 5.6.1 Middle East & Africa CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 5.6.2 Middle East & Africa CVD, PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031

6 Segmentation by Key Countries/Regions

  • 6.1 Key Countries/Regions CVD, PVD and ALD Coating for Chamber Components Sales Value Growth Trends, 2020 VS 2024 VS 2031
  • 6.2 Key Countries/Regions CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
  • 6.3 United States
    • 6.3.1 United States CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.3.2 United States CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.3.3 United States CVD, PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.4 Europe
    • 6.4.1 Europe CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.4.2 Europe CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.4.3 Europe CVD, PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.5 China
    • 6.5.1 China CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.5.2 China CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.5.3 China CVD, PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.6 Japan
    • 6.6.1 Japan CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.6.2 Japan CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.6.3 Japan CVD, PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.7 South Korea
    • 6.7.1 South Korea CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.7.2 South Korea CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.7.3 South Korea CVD, PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.8 Southeast Asia
    • 6.8.1 Southeast Asia CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.8.2 Southeast Asia CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.8.3 Southeast Asia CVD, PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
  • 6.9 India
    • 6.9.1 India CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
    • 6.9.2 India CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
    • 6.9.3 India CVD, PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031

7 Company Profiles

  • 7.1 TOCALO Co., Ltd.
    • 7.1.1 TOCALO Co., Ltd. Profile
    • 7.1.2 TOCALO Co., Ltd. Main Business
    • 7.1.3 TOCALO Co., Ltd. CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.1.4 TOCALO Co., Ltd. CVD, PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.1.5 TOCALO Co., Ltd. Recent Developments
  • 7.2 KoMiCo
    • 7.2.1 KoMiCo Profile
    • 7.2.2 KoMiCo Main Business
    • 7.2.3 KoMiCo CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.2.4 KoMiCo CVD, PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.2.5 KoMiCo Recent Developments
  • 7.3 Cinos
    • 7.3.1 Cinos Profile
    • 7.3.2 Cinos Main Business
    • 7.3.3 Cinos CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.3.4 Cinos CVD, PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.3.5 Cinos Recent Developments
  • 7.4 WONIK QnC
    • 7.4.1 WONIK QnC Profile
    • 7.4.2 WONIK QnC Main Business
    • 7.4.3 WONIK QnC CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.4.4 WONIK QnC CVD, PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.4.5 WONIK QnC Recent Developments
  • 7.5 Oerlikon Balzers
    • 7.5.1 Oerlikon Balzers Profile
    • 7.5.2 Oerlikon Balzers Main Business
    • 7.5.3 Oerlikon Balzers CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.5.4 Oerlikon Balzers CVD, PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.5.5 Oerlikon Balzers Recent Developments
  • 7.6 Beneq
    • 7.6.1 Beneq Profile
    • 7.6.2 Beneq Main Business
    • 7.6.3 Beneq CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.6.4 Beneq CVD, PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.6.5 Beneq Recent Developments
  • 7.7 Entegris
    • 7.7.1 Entegris Profile
    • 7.7.2 Entegris Main Business
    • 7.7.3 Entegris CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.7.4 Entegris CVD, PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.7.5 Entegris Recent Developments
  • 7.8 Inficon
    • 7.8.1 Inficon Profile
    • 7.8.2 Inficon Main Business
    • 7.8.3 Inficon CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.8.4 Inficon CVD, PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.8.5 Inficon Recent Developments
  • 7.9 SilcoTek
    • 7.9.1 SilcoTek Profile
    • 7.9.2 SilcoTek Main Business
    • 7.9.3 SilcoTek CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
    • 7.9.4 SilcoTek CVD, PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
    • 7.9.5 SilcoTek Recent Developments

8 Industry Chain Analysis

  • 8.1 CVD, PVD and ALD Coating for Chamber Components Industrial Chain
  • 8.2 CVD, PVD and ALD Coating for Chamber Components Upstream Analysis
    • 8.2.1 Key Raw Materials
    • 8.2.2 Raw Materials Key Suppliers
    • 8.2.3 Manufacturing Cost Structure
  • 8.3 Midstream Analysis
  • 8.4 Downstream Analysis (Customers Analysis)
  • 8.5 Sales Model and Sales Channels
    • 8.5.1 CVD, PVD and ALD Coating for Chamber Components Sales Model
    • 8.5.2 Sales Channel
    • 8.5.3 CVD, PVD and ALD Coating for Chamber Components Distributors

9 Research Findings and Conclusion

10 Appendix

  • 10.1 Research Methodology
    • 10.1.1 Methodology/Research Approach
      • 10.1.1.1 Research Programs/Design
      • 10.1.1.2 Market Size Estimation
      • 10.1.1.3 Market Breakdown and Data Triangulation
    • 10.1.2 Data Source
      • 10.1.2.1 Secondary Sources
      • 10.1.2.2 Primary Sources
  • 10.2 Author Details
  • 10.3 Disclaimer

List of Tables

  • Table 1. CVD, PVD and ALD Coating for Chamber Components Market Trends
  • Table 2. CVD, PVD and ALD Coating for Chamber Components Market Drivers & Opportunity
  • Table 3. CVD, PVD and ALD Coating for Chamber Components Market Challenges
  • Table 4. CVD, PVD and ALD Coating for Chamber Components Market Restraints
  • Table 5. Global CVD, PVD and ALD Coating for Chamber Components Revenue by Company (2020-2025) & (US$ Million)
  • Table 6. Global CVD, PVD and ALD Coating for Chamber Components Revenue Market Share by Company (2020-2025)
  • Table 7. Key Companies CVD, PVD and ALD Coating for Chamber Components Manufacturing Base Distribution and Headquarters
  • Table 8. Key Companies CVD, PVD and ALD Coating for Chamber Components Product Type
  • Table 9. Key Companies Time to Begin Mass Production of CVD, PVD and ALD Coating for Chamber Components
  • Table 10. Global CVD, PVD and ALD Coating for Chamber Components Companies Market Concentration Ratio (CR5 and HHI)
  • Table 11. Global Top Companies by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in CVD, PVD and ALD Coating for Chamber Components as of 2024)
  • Table 12. Mergers & Acquisitions, Expansion Plans
  • Table 13. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method: 2020 VS 2024 VS 2031 (US$ Million)
  • Table 14. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020-2025) & (US$ Million)
  • Table 15. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2026-2031) & (US$ Million)
  • Table 16. Global CVD, PVD and ALD Coating for Chamber Components Sales Market Share in Value by Coating Method (2020-2025)
  • Table 17. Global CVD, PVD and ALD Coating for Chamber Components Sales Market Share in Value by Coating Method (2026-2031)
  • Table 18. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Application: 2020 VS 2024 VS 2031 (US$ Million)
  • Table 19. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (2020-2025) & (US$ Million)
  • Table 20. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (2026-2031) & (US$ Million)
  • Table 21. Global CVD, PVD and ALD Coating for Chamber Components Sales Market Share in Value by Application (2020-2025)
  • Table 22. Global CVD, PVD and ALD Coating for Chamber Components Sales Market Share in Value by Application (2026-2031)
  • Table 23. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region, (2020 VS 2024 VS 2031) & (US$ Million)
  • Table 24. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025) & (US$ Million)
  • Table 25. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031) & (US$ Million)
  • Table 26. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025) & (%)
  • Table 27. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031) & (%)
  • Table 28. Key Countries/Regions CVD, PVD and ALD Coating for Chamber Components Sales Value Growth Trends, (US$ Million): 2020 VS 2024 VS 2031
  • Table 29. Key Countries/Regions CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2025) & (US$ Million)
  • Table 30. Key Countries/Regions CVD, PVD and ALD Coating for Chamber Components Sales Value, (2026-2031) & (US$ Million)
  • Table 31. TOCALO Co., Ltd. Basic Information List
  • Table 32. TOCALO Co., Ltd. Description and Business Overview
  • Table 33. TOCALO Co., Ltd. CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 34. Revenue (US$ Million) in CVD, PVD and ALD Coating for Chamber Components Business of TOCALO Co., Ltd. (2020-2025)
  • Table 35. TOCALO Co., Ltd. Recent Developments
  • Table 36. KoMiCo Basic Information List
  • Table 37. KoMiCo Description and Business Overview
  • Table 38. KoMiCo CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 39. Revenue (US$ Million) in CVD, PVD and ALD Coating for Chamber Components Business of KoMiCo (2020-2025)
  • Table 40. KoMiCo Recent Developments
  • Table 41. Cinos Basic Information List
  • Table 42. Cinos Description and Business Overview
  • Table 43. Cinos CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 44. Revenue (US$ Million) in CVD, PVD and ALD Coating for Chamber Components Business of Cinos (2020-2025)
  • Table 45. Cinos Recent Developments
  • Table 46. WONIK QnC Basic Information List
  • Table 47. WONIK QnC Description and Business Overview
  • Table 48. WONIK QnC CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 49. Revenue (US$ Million) in CVD, PVD and ALD Coating for Chamber Components Business of WONIK QnC (2020-2025)
  • Table 50. WONIK QnC Recent Developments
  • Table 51. Oerlikon Balzers Basic Information List
  • Table 52. Oerlikon Balzers Description and Business Overview
  • Table 53. Oerlikon Balzers CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 54. Revenue (US$ Million) in CVD, PVD and ALD Coating for Chamber Components Business of Oerlikon Balzers (2020-2025)
  • Table 55. Oerlikon Balzers Recent Developments
  • Table 56. Beneq Basic Information List
  • Table 57. Beneq Description and Business Overview
  • Table 58. Beneq CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 59. Revenue (US$ Million) in CVD, PVD and ALD Coating for Chamber Components Business of Beneq (2020-2025)
  • Table 60. Beneq Recent Developments
  • Table 61. Entegris Basic Information List
  • Table 62. Entegris Description and Business Overview
  • Table 63. Entegris CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 64. Revenue (US$ Million) in CVD, PVD and ALD Coating for Chamber Components Business of Entegris (2020-2025)
  • Table 65. Entegris Recent Developments
  • Table 66. Inficon Basic Information List
  • Table 67. Inficon Description and Business Overview
  • Table 68. Inficon CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 69. Revenue (US$ Million) in CVD, PVD and ALD Coating for Chamber Components Business of Inficon (2020-2025)
  • Table 70. Inficon Recent Developments
  • Table 71. SilcoTek Basic Information List
  • Table 72. SilcoTek Description and Business Overview
  • Table 73. SilcoTek CVD, PVD and ALD Coating for Chamber Components Products, Services and Solutions
  • Table 74. Revenue (US$ Million) in CVD, PVD and ALD Coating for Chamber Components Business of SilcoTek (2020-2025)
  • Table 75. SilcoTek Recent Developments
  • Table 76. Key Raw Materials Lists
  • Table 77. Raw Materials Key Suppliers Lists
  • Table 78. CVD, PVD and ALD Coating for Chamber Components Downstream Customers
  • Table 79. CVD, PVD and ALD Coating for Chamber Components Distributors List
  • Table 80. Research Programs/Design for This Report
  • Table 81. Key Data Information from Secondary Sources
  • Table 82. Key Data Information from Primary Sources

List of Figures

  • Figure 1. CVD, PVD and ALD Coating for Chamber Components Product Picture
  • Figure 2. Global CVD, PVD and ALD Coating for Chamber Components Sales Value, 2020 VS 2024 VS 2031 (US$ Million)
  • Figure 3. Global CVD, PVD and ALD Coating for Chamber Components Sales Value (2020-2031) & (US$ Million)
  • Figure 4. CVD, PVD and ALD Coating for Chamber Components Report Years Considered
  • Figure 5. Global CVD, PVD and ALD Coating for Chamber Components Players Revenue Ranking (2024) & (US$ Million)
  • Figure 6. The 5 and 10 Largest Companies in the World: Market Share by CVD, PVD and ALD Coating for Chamber Components Revenue in 2024
  • Figure 7. CVD, PVD and ALD Coating for Chamber Components Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
  • Figure 8. PVD Coating Method Picture
  • Figure 9. ALD Coating Method Picture
  • Figure 10. CVD Coating Method Picture
  • Figure 11. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020 VS 2024 VS 2031) & (US$ Million)
  • Figure 12. Global CVD, PVD and ALD Coating for Chamber Components Sales Value Market Share by Coating Method, 2024 & 2031
  • Figure 13. Product Picture of Etching Tools
  • Figure 14. Product Picture of Deposition Tools
  • Figure 15. Global CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (2020 VS 2024 VS 2031) & (US$ Million)
  • Figure 16. Global CVD, PVD and ALD Coating for Chamber Components Sales Value Market Share by Application, 2024 & 2031
  • Figure 17. North America CVD, PVD and ALD Coating for Chamber Components Sales Value (2020-2031) & (US$ Million)
  • Figure 18. North America CVD, PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 19. Europe CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 20. Europe CVD, PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 21. Asia Pacific CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 22. Asia Pacific CVD, PVD and ALD Coating for Chamber Components Sales Value by Region (%), 2024 VS 2031
  • Figure 23. South America CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 24. South America CVD, PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 25. Middle East & Africa CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 26. Middle East & Africa CVD, PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
  • Figure 27. Key Countries/Regions CVD, PVD and ALD Coating for Chamber Components Sales Value (%), (2020-2031)
  • Figure 28. United States CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 29. United States CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 30. United States CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 31. Europe CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 32. Europe CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 33. Europe CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 34. China CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 35. China CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 36. China CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 37. Japan CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 38. Japan CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 39. Japan CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 40. South Korea CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 41. South Korea CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 42. South Korea CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 43. Southeast Asia CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 44. Southeast Asia CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 45. Southeast Asia CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 46. India CVD, PVD and ALD Coating for Chamber Components Sales Value, (2020-2031) & (US$ Million)
  • Figure 47. India CVD, PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
  • Figure 48. India CVD, PVD and ALD Coating for Chamber Components Sales Value by Application (%), 2024 VS 2031
  • Figure 49. CVD, PVD and ALD Coating for Chamber Components Industrial Chain
  • Figure 50. CVD, PVD and ALD Coating for Chamber Components Manufacturing Cost Structure
  • Figure 51. Channels of Distribution (Direct Sales, and Distribution)
  • Figure 52. Bottom-up and Top-down Approaches for This Report
  • Figure 53. Data Triangulation
  • Figure 54. Key Executives Interviewed