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市場調查報告書
商品編碼
2099467
用於DRAM製造的光阻劑和EUV光化學品:市場佔有率分析、行業趨勢和統計數據以及成長預測(2026-2031年)Photoresist and EUV Photochemicals For DRAM Manufacturing - Market Share Analysis, Industry Trends & Statistics, Growth Forecasts (2026 - 2031) |
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根據 Mordor Intelligence 預測,DRAM 製造用光阻劑和 EUV 光化學品的市場規模預計將從 2025 年的 10.1 億美元和 2026 年的 11.8 億美元成長到 2031 年的 20.5 億美元,2026 年至 2031 年的複合年成長率為 1.8%。

本報告按波長(極紫外線、ArF浸沒式、KrF等)、抗蝕劑化學成分(化學放大抗蝕劑、金屬氧化物抗蝕劑等)、抗蝕劑特性(正性抗蝕劑、負性抗蝕劑)、DRAM產品類型(標準DRAM、行動DRAM等)和地區進行細分。市場預測以美元(USD)計價。
隨著EUV微影技術從先進DRAM製造的有限制程實驗轉變為常規生產工具,其快速普及成為DRAM生產用光阻劑和EUV光化學品市場最大的成長引擎。 SK海力士已在多代DRAM產品中擴展了EUV技術的應用,其1c藍圖已將EUV光刻技術應用於每片晶圓至少五層,從而導致抗蝕劑需求呈現持續成長趨勢。此外,該公司於2025年9月在其清州DRAM工廠安裝了高數值孔徑(NA)EUV光刻系統「TWINSCAN EXE 5200B」。這迫使材料供應商提前準備下一輪認證。 2026年3月,SK海力士宣布計畫向ASML採購30多台EUV掃描儀,總價值11.95兆韓元(約88億美元)。交付持續到2027年,這項訂單量表明,需要經認證的抗蝕劑系統的晶圓開工數量將持續成長。由於2026年記憶體客戶的EUV訂單幾乎售罄,瓶頸已從設備需求轉移到材料認證,這鞏固了已獲認證供應商的地位,並提高了新配方短期內的准入門檻。這項轉變意義重大,因為DRAM製造所需的EUV光阻劑和光化學品市場不再取決於晶圓廠是否需要EUV,而是取決於已通過核准的供應商能否快速擴大生產規模,生產出穩定可靠的生產級化學品,以滿足每增加一層的需求。
HBM日益成長的複雜性提升了DRAM製造用光阻劑和EUV光化學材料市場的品質價值。這是因為AI伺服器記憶體堆疊微影術的控制要求比主流DRAM產品更為嚴格。 HBM4堆疊的藍圖正朝著增加層數和提高互連結構密度的方向發展,從而在製程的每個階段提高對套刻精度、缺陷率和線邊緣控制的敏感度。這一趨勢也改變了供應商的經濟格局,因為同時擁有先進邏輯和先進記憶體認證的抗蝕劑供應商可以將開發成本分攤到更大、更高價值的基本客群中,同時在不同的客戶專案中保持一致的技術性能。北美市場的重要性也日益凸顯,SK海力士已獲得4.58億美元的CHIPS融資,用於其位於印第安納州西拉法葉的HBM先進封裝廠。這將創建一個新的高階需求中心,需要一個靠近基本客群的可靠材料供應系統。此外,良率在HBM生產中也變得癒發關鍵。這是因為,在高附加價值多層產品中,缺陷造成的損失比標準通用DRAM造成的成本損失更大。因此,DRAM製造用光阻劑和EUV光化學品的市場不僅隨著HBM的普及而擴大,而且定價結構也在向更加注重性能和缺陷控制而非單純供應量的方向轉變。
在DRAM製造用光阻劑和EUV光化學材料市場,漫長的認證週期仍然是最嚴重的內部限制因素。這是因為即使是技術前景良好的材料,在量產部署前也需要進行耗時的晶圓級檢驗。對於MOR和不含PFAS的CAR等新型化學成分,這個問題特別突出,因為良好的實驗室結果並不能保證快速過渡到DRAM量產。供應商需要檢驗曝光設備、光阻路徑、烘焙條件、顯影劑、缺陷圖譜和良率窗口等各個環節的製程整合,這增加了供應商獲得穩定商業性收入所需的時間和成本。因此,已經融入客戶流程的現有供應商具有結構性優勢,因為先進節點配方的每次變更都需要額外的製程檢驗和內部核准流程。這減緩了DRAM製造用光阻劑和EUV光化學材料的市場佔有率波動,阻礙了新參與企業將技術進步轉化為商業銷售的速度與市場需求相匹配。這也解釋了為什麼擁有雄厚資金支持的成熟供應商仍然比新參與企業更具優勢,因為他們可以分攤多個DRAM世代的研發成本。
2025年,ArF浸沒式曝光技術將佔據DRAM製造用光阻劑和EUV光化學材料市場波長細分市場的61.54%,其穩固的基礎將繼續使其在大多數商用DRAM層光阻劑需求中佔據核心地位。 ArF浸沒式曝光技術在DRAM製造用光阻劑和EUV光化學材料市場中61.54%的佔有率反映了該技術在迭代圖形化製程中的作用,而迭代圖形化製程在各種晶圓製程中仍佔據主導地位。原因很簡單:DRAM製造商仍依賴SAQP及相關的多層多重圖形化技術,而ArF浸沒式曝光技術在這些製程中仍具有成本效益且操作簡便。即使更多關鍵層轉向EUV工藝,這種廣泛的應用基礎將使ArF浸沒式曝光技術的出貨量保持強勁,從而避免傳統大規模生產抗蝕劑需求的急劇下降。這在DRAM製造用光阻劑和EUV光化學材料產業中形成了雙重供應需求。換句話說,儘管晶圓廠仍在大量採購ArFi材料,但它們也越來越依賴經過認證的EUV材料。因此,擁有廣泛產品系列的供應商比專注於特定領域的專業供應商更具優勢,因為他們既可以支援當前的生產,又可以同時致力於未來層材料的認證工作。
EUV是成長最快的波長段,預計到2031年將以12.67%的複合年成長率成長。這反映出在整個先進DRAM藍圖中,EUV層數的穩定成長。三星和SK海力士在2026年初之前已建立了重要的高數值孔徑(NA)EUV製程基礎,為抗蝕劑供應商下一階段的認證和製程調整提供了更清晰的基礎。 JSR和Implia也報告了其在低NA和高NA EUV應用的正性調和負性調MOR系統方面取得的進展,表明材料開發與掃描儀的準備工作同步進行,而非滯後。事實上,DRAM製造中EUV光阻劑和光化學品的成長並非源自於晶圓上ArFi的簡單替代,而是源自於層數的增加。這持續增加每片晶圓的材料總用量。這是因為,雖然 DRAM 節點中出現了新的 EUV 機遇,但由於成本和製程原因,DRAM 製造的光阻劑和 EUV 光化學品市場中仍然有幾個層面大量使用 ArFi。
2025年,化學放大抗蝕劑將佔據DRAM製造光阻劑和EUV光化學市場80.12%的佔有率。這一主導地位反映了數十年來在ArF光阻和現有EUV應用案例中開展的合作開發、工藝熟練度和嵌入式認證。 2025年,化學放大抗蝕劑將佔據光阻劑和EUV光化學市場80.12%的佔有率,這得益於其與抗蝕劑並非易事,因為它不僅影響塗佈瓶,還會影響周圍的工藝流程和客戶的認證負擔。住友化學和杜邦公司持續推動用於先進光刻技術的化學放大光阻(CAR)開發,杜邦公司的Qnity團隊在2025年SPIE會議上展示了關於ArF抗蝕劑PFAS替代品的研究成果。這顯示現有的化學體系並未停滯不前,而是不斷發展演進。這對DRAM製造的光阻劑和EUV光化學品市場具有重大意義,因為CAR仍然是支撐向新型化學平台過渡的重要生產基礎。這也意味著,在將大部分生產流程轉向不太成熟的材料類別之前,客戶更有可能在多個階段首先採用更清潔、更規範的CAR配方。
在DRAM製造的光阻劑和EUV光化學市場中,金屬氧化物抗蝕劑是成長最快的化學品領域,預計2026年至2031年的複合年成長率將達到13.07%。這主要歸功於其對EUV光子的高吸收率和優異的產能特性。 2026年2月,Imec公司證明,在富氧的曝光後烘烤環境下,金屬氧化物光阻(MOR)的光敏感性提高了15%至20%。這直接降低了EUV條件下的曝光劑量要求,從而提高了掃描儀的生產效率。這項結果意義重大,因為產能一直是MOR應用的主要障礙之一,而降低曝光劑量將促進這種材料在高成本先進製程節點上的應用。此外,JSR公司與Entegris公司於2026年5月簽署的交叉授權合約表明,圍繞MOR的競爭已擴展到化學領域之外,涵蓋了前驅體合成、過濾和清潔供應鏈基礎設施等環節。 IBM 在 SPIE 2025 會議上發表的研究進一步印證了這一趨勢,展示了硬體輔助 MOR圖形化在滿足先進製造需求的更精細間距方面的進步。儘管在用於 DRAM 製造的光阻劑和 EUV 光化學市場中,MOR 的市場佔有率仍然小於 CAR,但其發展勢頭不再僅僅停留在理論層面,而是得到了可衡量的製程優勢的支持。
2025年,亞太地區佔據DRAM製造用光阻劑和EUV光刻化學品市場88.42%的佔有率。這反映了DRAM晶圓生產與韓國、日本和台灣地區抗蝕劑製造能力之間的緊密聯繫。亞太地區在光阻劑和供應方面都佔據著舉足輕重的地位。韓國仍是最大的國內需求基地,三星電子和SK海力士持續推動尖端DRAM生產,並加大對EUV技術的前期投資。 2026年3月,SK海力士宣布計畫在2027年前採購價值11.95兆韓元(約88億美元)的EUV光刻機,進一步鞏固了這個市場前景。這為認證材料的長期需求提供了保障。在供應方面,日本也保持著重要的地位。 TOK、JSR、信越化學、住友化學和FUJIFILM繼續運作著一個緊密的半導體材料研發和生產網路,其中包括信越化學在伊勢崎的新國內投資。
北美是成長最快的地區,預計2026年至2031年的複合年成長率將達到12.56%。這反映了DRAM製造投資進入了一個新階段,而非傳統的產能更新周期。美光在愛達荷州和紐約州的計畫獲得了高達64億美元的CHIPS基金支持,大大鞏固了該地區國內儲存材料需求的長期前景。 SK海力士在印第安納州的HBM封裝計畫獲得了4.58億美元的投資,新增了一個高階需求來源。同時,三星在德克薩斯州的投資也進一步拓展了美國半導體材料的商業機會。這項新的擴張意義重大,因為北美DRAM製造用光阻劑和EUV光化學品的市場更多地受到國內認證要求、對PFAS(全氟烷基物質)的審查以及供應鏈可追溯性要求的影響,而非現有產能。
儘管歐洲的市佔率不大,但其戰略地位仍舉足輕重,這主要歸功於其在製程開發而非直接生產DRAM晶圓方面所發揮的影響力。比利時Imec的NanoIC和EUV研究計畫持續支持抗蝕劑的合作開發。該研究所於2026年2月發布的MOR研究成果表明,在富氧後曝光燒結(PEB)條件下,光敏感性提高了15-20%。這表明,儘管歐洲在全球DRAM產量中所佔佔有率不及其他國家,但在推動下一代光刻技術成熟度方面,歐洲仍扮演著至關重要的角色。對於世界其他地區而言,主要叢集之外的建設計畫在當前的DRAM光阻劑需求中仍然微乎其微,因為這些計劃尚未達到足以顯著改變DRAM光阻劑和EUV光化學品市場短期採購模式的規模。
According to Mordor Intelligence, the photoresist and EUV photochemicals market for DRAM manufacturing size is projected to expand from USD 1.01 billion in 2025 and USD 1.18 billion in 2026 to USD 2.05 billion by 2031, registering a CAGR of 11.68% between 2026 and 2031.

This report is Segmented by Wavelength (Extreme Ultraviolet, Arf Immersion, Krf, and More), Resist Chemistry (Chemically Amplified Resists, Metal-Oxide Resists, and More), Resist Tone (Positive Tone Resists, and Negative Tone Resists), DRAM Product Type (Standard DRAM, Mobile DRAM, and More), and Geography. The Market Forecasts are Provided in Terms of Value (USD).
Rapid EUV adoption has become the strongest growth engine in the photoresist and EUV photochemicals Market for DRAM manufacturing, as advanced DRAM now uses EUV as a recurring production tool rather than a limited process experiment. SK hynix had already expanded EUV use across successive DRAM generations, and its 1c roadmap moved to at least 5 EUV layers per wafer, which raised resist demand in a stepwise manner rather than gradually. The company also installed a TWINSCAN EXE:5200B high-NA EUV system at its Cheongju DRAM fab in September 2025, which pushed material suppliers to prepare for the next qualification cycle earlier than before. In March 2026, SK hynix disclosed a plan to buy more than 30 additional EUV scanners from ASML for KRW 11.95 trillion (USD 8.8 billion), with deliveries scheduled through 2027, and that order volume pointed to a sustained rise in wafer starts requiring qualified resist systems. Once memory customer EUV orders for 2026 were effectively sold out, the bottleneck shifted from tool demand to materials qualification, strengthening the position of suppliers already qualified and raising the near-term entry barrier for new formulations. This shift matters because the photoresist and EUV photochemicals Market for DRAM manufacturing now depends less on whether fabs want EUV and more on whether approved suppliers can scale consistent, production-grade chemistry fast enough to support each added layer.
Rising HBM complexity is lifting the quality value of the photoresist and EUV photochemicals Market for DRAM manufacturing, because AI server memory stacks demand tighter lithography control than mainstream DRAM products. HBM4 stack roadmaps are moving to higher layer counts and denser interconnect structures, and that raises sensitivity to overlay, defectivity, and line-edge control across each processing step. That pattern changes supplier economics, because a resist vendor qualified in both advanced logic and advanced memory can spread development costs across larger, high-value accounts while maintaining consistent technical performance across different customer programs. North America also became more relevant when SK hynix secured USD 458 million in CHIPS support for its HBM advanced packaging facility in West Lafayette, Indiana, creating a new premium-grade demand node that will require dependable material support close to its customer base. HBM production also makes yield more valuable, because defect losses carry a larger cost penalty on high-value stacked products than on standard commodity DRAM. As a result, the photoresist and EUV photochemicals market is not only expanding in volume through HBM, it is also moving toward a pricing structure where performance and defect control matter more than simple volume supply.
Long qualification cycles remain the most serious internal restraint on the photoresist and EUV photochemicals market for DRAM manufacturing, because technically promising materials still need extended on-wafer validation before any volume rollout. The problem is especially visible for newer chemistries such as MOR and PFAS-free CAR, where even a favorable lab result does not guarantee a fast transfer into DRAM mass production. Process integration must be checked across exposure tools, tracks, bake conditions, developers, defect maps, and yield windows, and that raises both time and cost before a supplier can secure stable commercial revenue. The result is a structural advantage for incumbent vendors that already sit inside customer flows, because every formulation change at advanced nodes can trigger additional process checks and internal approval cycles. That slows down share shifts in the photoresist and EUV photochemicals Market for DRAM manufacturing and keeps novel entrants from converting technical progress into commercial sales as quickly as demand conditions might suggest. It also explains why capital-backed incumbents are still better positioned than challengers to absorb pre-revenue development costs over multiple DRAM generations.
Other drivers and restraints analyzed in the detailed report include:
For complete list of drivers and restraints, kindly check the Table Of Contents.
ArF immersion held 61.54% of the wavelength segment of photoresist and EUV photochemicals market for DRAM manufacturing in 2025, and that large base kept it at the center of photoresist demand across most commercially produced DRAM layers. ArF immersion accounted for 61.54% of the photoresist and EUV photochemicals market for DRAM manufacturing in 2025, reflecting its role in repeated patterning flows that still dominate broad sections of the wafer process. The reason is practical, because DRAM makers still rely on SAQP and related multi-patterning methods across several layers, where ArFi remains cost-effective and operationally familiar. That installed base keeps ArFi volume resilient even as more critical layers shift toward EUV, and it prevents a rapid collapse in legacy high-volume resist demand. In the photoresist and EUV photochemicals industry, this creates a dual-track supply need where fabs continue buying large ArFi volumes while also increasing their dependence on qualified EUV materials. Suppliers with broad portfolios, therefore, remain better placed than narrow specialists, because they can support current production while qualifying future layers in parallel.
EUV was the fastest-growing wavelength segment, with a 12.67% CAGR through 2031, reflecting a steady increase in EUV layer counts across advanced DRAM roadmaps. Samsung and SK hynix had already built a meaningful high-NA EUV process base by early 2026, which gave resist vendors a clearer platform for next-step qualification and process tuning. JSR and Inpria also documented progress on both positive-tone and negative-tone MOR systems for low-NA and high-NA EUV applications, which shows that materials development is now moving alongside scanner preparation rather than trailing it. The practical effect is that EUV growth in the photoresist and EUV photochemicals Market for DRAM manufacturing is coming from layer additions rather than simple replacement of ArFi use across the whole wafer. That keeps total material intensity per wafer moving upward, because DRAM nodes are adding new EUV opportunities while still holding on to several ArFi-intensive layers for cost and process reasons in the photoresist and EUV photochemicals market for DRAM manufacturing.
Chemically amplified resists held 80.12% share of photoresist and EUV photochemicals market for DRAM manufacturing in 2025, and that lead reflected decades of co-development, process familiarity, and embedded qualification across both ArFi and current EUV use cases. Chemically amplified resists accounted for 80.12% of the photoresist and EUV photochemicals market in 2025, underscoring their deep integration with established track systems, anti-reflective layers, and developer chemistry already used in DRAM fabs. That installed position is difficult to displace because switching the resist chemistry does not affect only the coating bottle; it also affects the surrounding process stack and the customer qualification burden. Sumitomo Chemical and DuPont have continued to advance CAR development for advanced lithography, and DuPont's Qnity team presented work on PFAS alternatives for ArF resist at SPIE in 2025, demonstrating that incumbent chemistry families are still evolving rather than standing still. This matters for the photoresist and EUV photochemicals market because CAR remains the volume foundation that funds the transition into newer chemistry platforms. It also means customers are likely to adopt cleaner or more compliant CAR formulations first across many layers before shifting larger shares of flow to less-proven material classes.
Metal-oxide resists were the fastest-growing chemistry segment, of the photoresist and EUV photochemicals market for DRAM manufacturing, at a 13.07% CAGR over 2026-2031, driven by their stronger EUV photon absorption and their improving throughput profile. Imec showed in February 2026 that an oxygen-enriched post-exposure bake environment improved MOR photo-speed by 15-20%, which directly reduced dose needs and improved scanner productivity under EUV conditions. That result mattered because throughput has been one of the main barriers to wider MOR use, and any dose reduction makes the material case stronger at expensive advanced nodes. JSR's May 2026 cross-licensing agreement with Entegris also showed that MOR competition is moving beyond chemistry alone and into precursor synthesis, filtration, and clean delivery infrastructure. IBM research presented through SPIE 2025 added further support by showing hardware-assisted MOR patterning progress at fine pitches relevant to advanced manufacturing needs. In the photoresist and EUV photochemicals market, MOR is still smaller than CAR today, but its momentum is now tied to measurable process gains rather than to only theoretical promise.
Asia-Pacific accounted for 88.42% of thephotoresist and EUV photochemicals market for DRAM manufacturing industry in 2025, reflecting the close link between DRAM wafer production and resist manufacturing capacity in South Korea, Japan, and Taiwan. Asia-Pacific accounted for 88.42% of the photoresist and EUV photochemicals market in 2025, making the region the clear center of both consumption and supply. South Korea remained the largest national demand base because Samsung Electronics and SK Hynix continued to anchor advanced DRAM output and forward EUV investment. SK hynix strengthened that outlook in March 2026 when it disclosed its KRW 11.95 trillion (USD 8.8 billion) EUV scanner purchase plan through 2027, which supported a longer visible demand pipeline for qualified materials. Japan remained just as important on the supply side, as TOK, JSR, Shin-Etsu Chemical, Sumitomo Chemical, and Fujifilm continued to operate dense R&D and production networks for semiconductor materials, including new domestic investment from Shin-Etsu in Isesaki.
North America was the fastest-growing geography, with a 12.56% CAGR over 2026-2031, reflecting a new phase of DRAM manufacturing investment rather than a typical capacity refresh cycle. Micron's Idaho and New York projects, backed by up to USD 6.4 billion in CHIPS support, created the strongest long-term case for domestic memory materials demand in the region. SK hynix also added a premium demand point through its USD 458 million supported HBM packaging project in Indiana, while Samsung's Texas investment widened the broader semiconductor materials opportunity across the United States. This new build-out matters because the photoresist and EUV photochemicals market in North America is being shaped by domestic qualification, PFAS scrutiny, and supply chain traceability requirements more than by legacy installed capacity.
Europe held a modest share, but it remained strategically important because much of the region's influence came through process development rather than through direct DRAM wafer volume. Imec's NanoIC and EUV research programs in Belgium continued to support resist co-development, and the institute's February 2026 MOR work showed a 15-20% photo-speed improvement under oxygen-enriched post-exposure bake conditions. That gave Europe an outsized role in advancing next-generation lithography readiness even without a comparable share of global DRAM output. The Rest of the World remained negligible for current DRAM photoresist demand, because emerging fab plans outside the main clusters have not yet reached the scale needed to materially change near-term purchasing patterns in the photoresist and EUV photochemicals market for DRAM manufacturing.