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市場調查報告書
商品編碼
1872051

乾式蝕刻設備：全球市佔率及排名、總收入及需求預測（2025-2031年）

Dry Etching Equipment - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031
出版日期: | 出版商: QYResearch | 英文 114 Pages | 商品交期: 2-3個工作天內

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全球乾式蝕刻設備市場預計在 2024 年達到 125 億美元，預計到 2031 年將達到 191.9 億美元，2025 年至 2031 年的複合年成長率為 6.4%。

本報告對近期與乾蝕刻設備相關的關稅調整和國際戰略反制措施進行了全面評估，包括跨境產業佈局、資本配置模式、區域經濟相互依存關係和供應鏈重組。

乾式蝕刻是一種工藝，其中材料（通常是半導體材料的遮罩圖案）受到離子轟擊（通常是反應氣體的等離子體，例如氟化合物、氧氣、氯氣、三氯化硼，有時會添加氮氣、氬氣、氦氣或其他氣體），以燒蝕和去除暴露表面上的部分材料。

目前，全球乾蝕蝕設備生產集中度較高。根據2019年乾式蝕刻設備銷售額，前三大廠商佔了92.16%的市場。按地區分類，亞太地區是最大的消費地區，佔2019年銷售額的76.07%，其次是北美，佔13%。

隨著積體電路製程尺寸的不斷縮小，尤其是在7nm至28nm先進製程領域，對乾式蝕刻設備的需求持續成長。由於深紫外光微影術設備受限於光波長，晶圓廠必須採用多道掩模製程和蝕刻製程才能實現小型化。製造7nm積體電路所需的蝕刻步驟數為140步，是28nm製程（40步）的2.5倍。

蝕刻設備在全球半導體製造設備市場中佔最大佔有率。

全球競爭格局：

全球蝕刻設備市場是一個高度集中的競爭結構，由 Lam Research、Applied Materials 和 Tokyo Electron 等主要國際公司主導，這些公司擁有先進的技術和廣泛的基本客群，並在全球市場保持強大的競爭力。

中國的競爭情勢：

在中國市場，AMEC和北華創等本土企業在蝕刻設備領域極具競爭力，已發展成為國內蝕刻設備產業的主要企業。這些企業不斷加大研發投入，致力於提升產品性能和技術水平，並積極拓展市場佔有率。

技術進步：

隨著半導體技術的不斷進步，整合電路線寬不斷縮小，對蝕刻設備提出了越來越高的要求。

3D積體電路的發展正在推動蝕刻技術的發展。例如，3D NAND晶片堆疊層數的競爭對高深長寬比蝕刻和多層堆疊技術提出了更高的要求。

市場需求：

人工智慧、5G 和物聯網 (IoT) 等領域的快速發展正在推動對半導體晶片的需求不斷成長，從而促進了蝕刻設備市場的成長。

中國當地已連續四年成為全球最大的半導體設備市場，並且在新晶圓製造計劃數量方面也位居世界第一，為乾蝕刻設備市場提供了廣闊的發展空間。

政策支持：

為了支持半導體產業的發展，中國政府不斷實施相關政策，例如擴大研發投入和提高國內生產力，預計將進一步促進乾蝕設備市場的成長。

摘要，乾蝕蝕設備市場發展前景廣闊，市場潛力大。隨著技術進步、市場需求不斷成長以及政策支援的持續加強，乾蝕設備市場預計將繼續保持成長動能。

本報告旨在按地區/國家、類型和應用對全球乾蝕蝕刻設備市場進行全面分析，重點關注總銷售量、收入、價格、市場佔有率和主要企業的排名。

本報告以銷售量（台）和收入（百萬美元）為單位，對乾蝕蝕刻設備市場規模、估算和預測進行了呈現，以2024年為基準年，並涵蓋了2020年至2031年的歷史數據和預測數據。定量和定性分析將幫助讀者制定乾蝕設備業務和成長策略，評估市場競爭，分析公司在當前市場中的地位，並做出明智的商業決策。

市場區隔

公司

  • Lam Research
  • Tokyo Electron Limited
  • Applied Materials
  • Hitachi High-Tech
  • SEMES
  • AMEC
  • NAURA
  • SPTS Technologies（KLA）
  • Oxford Instruments
  • ULVAC
  • Plasma-Therm
  • GigaLane
  • VM
  • Jusung Engineering
  • SAMCO

按類型分類的細分市場

  • 感應耦合電漿（ICP）
  • 電容耦合等離子體（CCP）
  • 反應離子蝕刻（RIE）
  • 深反應離子蝕刻（DRIE）
  • 其他

應用領域

  • 邏輯與記憶體
  • MEMS
  • 功率元件
  • 其他

按地區

  • 北美洲
    • 美國
    • 加拿大
  • 亞太地區
    • 中國
    • 日本
    • 韓國
    • 東南亞
    • 印度
    • 澳洲
    • 亞太其他地區
  • 歐洲
    • 德國
    • 法國
    • 英國
    • 義大利
    • 荷蘭
    • 北歐國家
    • 其他歐洲
  • 拉丁美洲
    • 墨西哥
    • 巴西
    • 其他拉丁美洲
  • 中東和非洲
    • 土耳其
    • 沙烏地阿拉伯
    • 阿拉伯聯合大公國
    • 其他中東和非洲地區

The global market for Dry Etching Equipment was estimated to be worth US$ 12500 million in 2024 and is forecast to a readjusted size of US$ 19190 million by 2031 with a CAGR of 6.4% during the forecast period 2025-2031.

This report provides a comprehensive assessment of recent tariff adjustments and international strategic countermeasures on Dry Etching Equipment cross-border industrial footprints, capital allocation patterns, regional economic interdependencies, and supply chain reconfigurations.

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.

Currently, global production of Dry Etching Equipment is concentrated. The top three manufacturers held 92.16% of the market, in terms of Dry Etching Equipment sales value in 2019. As for the region, APAC is the largest consumption region, holding 76.07% sales revenue market share in 2019, followed by North America, with 13% market share.

With the continuous reduction of integrated circuit process, especially the production of 7nm-28nm advanced process, the demand for dry etching equipment continues to increase. Since DUV lithography machines are limited by the wavelength of light, wafer fabs need to adopt multiple mask processes and use etching processes to achieve smaller sizes. The etching process required for 7nm integrated circuit production is 140 times, which is 2.5 times the 40 times required for 28nm production.

Etching equipment accounts for the highest proportion in the global semiconductor equipment market.

Global competition:

The global etching equipment market presents a highly concentrated competition pattern, with international giants such as Lam Research, Applied Materials, and Tokyo Electron occupying a dominant position. These companies have advanced technology and rich customer resources and have strong competitiveness in the global market.

Chinese competition:

In the Chinese market, local companies such as AMEC and North Huachuang have strong competitiveness in the field of etching machines and have become leading companies in the domestic etching machine industry. These companies continue to increase R&D investment, improve product performance and technical level, and actively seize market share.

Technological progress:

With the continuous advancement of semiconductor technology, the line width of integrated circuits continues to decrease, and the requirements for etching equipment are getting higher and higher.

The development of 3D integrated circuits has promoted the development of etching technology. For example, the competition for the number of stacking layers of 3D NAND has put forward higher requirements for high aspect ratio etching and multi-stack stacking technology.

Market demand:

The rapid development of artificial intelligence, 5G, Internet of Things and other fields has driven the increase in demand for semiconductor chips, which in turn has promoted the growth of the etching equipment market.

Mainland China has become the world's largest semiconductor equipment market for four consecutive years, and the number of new wafer fab projects ranks first in the world, providing a broad development space for the dry etching equipment market.

Policy support:

The Chinese government has continuously issued relevant policies to support the development of the semiconductor industry, including increasing R&D investment and improving the localization rate, which will further promote the growth of the dry etching equipment market.

In summary, the dry etching equipment market has broad development prospects and huge market potential. With technological progress, increased market demand and continuous strengthening of policy support, the dry etching equipment market will continue to grow.

This report aims to provide a comprehensive presentation of the global market for Dry Etching Equipment, focusing on the total sales volume, sales revenue, price, key companies market share and ranking, together with an analysis of Dry Etching Equipment by region & country, by Type, and by Application.

The Dry Etching Equipment market size, estimations, and forecasts are provided in terms of sales volume (Units) and sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Dry Etching Equipment.

Market Segmentation

By Company

  • Lam Research
  • Tokyo Electron Limited
  • Applied Materials
  • Hitachi High-Tech
  • SEMES
  • AMEC
  • NAURA
  • SPTS Technologies (KLA)
  • Oxford Instruments
  • ULVAC
  • Plasma-Therm
  • GigaLane
  • VM
  • Jusung Engineering
  • SAMCO

Segment by Type

  • Inductively Coupled Plasma (ICP)
  • Capacitive Coupled Plasma (CCP)
  • Reactive Ion Etching (RIE)
  • Deep Reactive Ion Etching (DRIE)
  • Others

Segment by Application

  • Logic and Memory
  • MEMS
  • Power Device
  • Others

By Region

  • North America
    • United States
    • Canada
  • Asia-Pacific
    • China
    • Japan
    • South Korea
    • Southeast Asia
    • India
    • Australia
    • Rest of Asia-Pacific
  • Europe
    • Germany
    • France
    • U.K.
    • Italy
    • Netherlands
    • Nordic Countries
    • Rest of Europe
  • Latin America
    • Mexico
    • Brazil
    • Rest of Latin America
  • Middle East & Africa
    • Turkey
    • Saudi Arabia
    • UAE
    • Rest of MEA

Chapter Outline

Chapter 1: Introduces the report scope of the report, global total market size (value, volume and price). This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.

Chapter 2: Detailed analysis of Dry Etching Equipment manufacturers competitive landscape, price, sales and revenue market share, latest development plan, merger, and acquisition information, etc.

Chapter 3: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.

Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.

Chapter 5: Sales, revenue of Dry Etching Equipment in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.

Chapter 6: Sales, revenue of Dry Etching Equipment in country level. It provides sigmate data by Type, and by Application for each country/region.

Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.

Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.

Chapter 9: Conclusion.

Table of Contents

1 Market Overview

  • 1.1 Dry Etching Equipment Product Introduction
  • 1.2 Global Dry Etching Equipment Market Size Forecast
    • 1.2.1 Global Dry Etching Equipment Sales Value (2020-2031)
    • 1.2.2 Global Dry Etching Equipment Sales Volume (2020-2031)
    • 1.2.3 Global Dry Etching Equipment Sales Price (2020-2031)
  • 1.3 Dry Etching Equipment Market Trends & Drivers
    • 1.3.1 Dry Etching Equipment Industry Trends
    • 1.3.2 Dry Etching Equipment Market Drivers & Opportunity
    • 1.3.3 Dry Etching Equipment Market Challenges
    • 1.3.4 Dry Etching Equipment Market Restraints
  • 1.4 Assumptions and Limitations
  • 1.5 Study Objectives
  • 1.6 Years Considered

2 Competitive Analysis by Company

  • 2.1 Global Dry Etching Equipment Players Revenue Ranking (2024)
  • 2.2 Global Dry Etching Equipment Revenue by Company (2020-2025)
  • 2.3 Global Dry Etching Equipment Players Sales Volume Ranking (2024)
  • 2.4 Global Dry Etching Equipment Sales Volume by Company Players (2020-2025)
  • 2.5 Global Dry Etching Equipment Average Price by Company (2020-2025)
  • 2.6 Key Manufacturers Dry Etching Equipment Manufacturing Base and Headquarters
  • 2.7 Key Manufacturers Dry Etching Equipment Product Offered
  • 2.8 Key Manufacturers Time to Begin Mass Production of Dry Etching Equipment
  • 2.9 Dry Etching Equipment Market Competitive Analysis
    • 2.9.1 Dry Etching Equipment Market Concentration Rate (2020-2025)
    • 2.9.2 Global 5 and 10 Largest Manufacturers by Dry Etching Equipment Revenue in 2024
    • 2.9.3 Global Top Manufacturers by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Dry Etching Equipment as of 2024)
  • 2.10 Mergers & Acquisitions, Expansion

3 Segmentation by Type

  • 3.1 Introduction by Type
    • 3.1.1 Inductively Coupled Plasma (ICP)
    • 3.1.2 Capacitive Coupled Plasma (CCP)
    • 3.1.3 Reactive Ion Etching (RIE)
    • 3.1.4 Deep Reactive Ion Etching (DRIE)
    • 3.1.5 Others
  • 3.2 Global Dry Etching Equipment Sales Value by Type
    • 3.2.1 Global Dry Etching Equipment Sales Value by Type (2020 VS 2024 VS 2031)
    • 3.2.2 Global Dry Etching Equipment Sales Value, by Type (2020-2031)
    • 3.2.3 Global Dry Etching Equipment Sales Value, by Type (%) (2020-2031)
  • 3.3 Global Dry Etching Equipment Sales Volume by Type
    • 3.3.1 Global Dry Etching Equipment Sales Volume by Type (2020 VS 2024 VS 2031)
    • 3.3.2 Global Dry Etching Equipment Sales Volume, by Type (2020-2031)
    • 3.3.3 Global Dry Etching Equipment Sales Volume, by Type (%) (2020-2031)
  • 3.4 Global Dry Etching Equipment Average Price by Type (2020-2031)

4 Segmentation by Application

  • 4.1 Introduction by Application
    • 4.1.1 Logic and Memory
    • 4.1.2 MEMS
    • 4.1.3 Power Device
    • 4.1.4 Others
  • 4.2 Global Dry Etching Equipment Sales Value by Application
    • 4.2.1 Global Dry Etching Equipment Sales Value by Application (2020 VS 2024 VS 2031)
    • 4.2.2 Global Dry Etching Equipment Sales Value, by Application (2020-2031)
    • 4.2.3 Global Dry Etching Equipment Sales Value, by Application (%) (2020-2031)
  • 4.3 Global Dry Etching Equipment Sales Volume by Application
    • 4.3.1 Global Dry Etching Equipment Sales Volume by Application (2020 VS 2024 VS 2031)
    • 4.3.2 Global Dry Etching Equipment Sales Volume, by Application (2020-2031)
    • 4.3.3 Global Dry Etching Equipment Sales Volume, by Application (%) (2020-2031)
  • 4.4 Global Dry Etching Equipment Average Price by Application (2020-2031)

5 Segmentation by Region

  • 5.1 Global Dry Etching Equipment Sales Value by Region
    • 5.1.1 Global Dry Etching Equipment Sales Value by Region: 2020 VS 2024 VS 2031
    • 5.1.2 Global Dry Etching Equipment Sales Value by Region (2020-2025)
    • 5.1.3 Global Dry Etching Equipment Sales Value by Region (2026-2031)
    • 5.1.4 Global Dry Etching Equipment Sales Value by Region (%), (2020-2031)
  • 5.2 Global Dry Etching Equipment Sales Volume by Region
    • 5.2.1 Global Dry Etching Equipment Sales Volume by Region: 2020 VS 2024 VS 2031
    • 5.2.2 Global Dry Etching Equipment Sales Volume by Region (2020-2025)
    • 5.2.3 Global Dry Etching Equipment Sales Volume by Region (2026-2031)
    • 5.2.4 Global Dry Etching Equipment Sales Volume by Region (%), (2020-2031)
  • 5.3 Global Dry Etching Equipment Average Price by Region (2020-2031)
  • 5.4 North America
    • 5.4.1 North America Dry Etching Equipment Sales Value, 2020-2031
    • 5.4.2 North America Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
  • 5.5 Europe
    • 5.5.1 Europe Dry Etching Equipment Sales Value, 2020-2031
    • 5.5.2 Europe Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
  • 5.6 Asia Pacific
    • 5.6.1 Asia Pacific Dry Etching Equipment Sales Value, 2020-2031
    • 5.6.2 Asia Pacific Dry Etching Equipment Sales Value by Region (%), 2024 VS 2031
  • 5.7 South America
    • 5.7.1 South America Dry Etching Equipment Sales Value, 2020-2031
    • 5.7.2 South America Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
  • 5.8 Middle East & Africa
    • 5.8.1 Middle East & Africa Dry Etching Equipment Sales Value, 2020-2031
    • 5.8.2 Middle East & Africa Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031

6 Segmentation by Key Countries/Regions

  • 6.1 Key Countries/Regions Dry Etching Equipment Sales Value Growth Trends, 2020 VS 2024 VS 2031
  • 6.2 Key Countries/Regions Dry Etching Equipment Sales Value and Sales Volume
    • 6.2.1 Key Countries/Regions Dry Etching Equipment Sales Value, 2020-2031
    • 6.2.2 Key Countries/Regions Dry Etching Equipment Sales Volume, 2020-2031
  • 6.3 United States
    • 6.3.1 United States Dry Etching Equipment Sales Value, 2020-2031
    • 6.3.2 United States Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
    • 6.3.3 United States Dry Etching Equipment Sales Value by Application, 2024 VS 2031
  • 6.4 Europe
    • 6.4.1 Europe Dry Etching Equipment Sales Value, 2020-2031
    • 6.4.2 Europe Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
    • 6.4.3 Europe Dry Etching Equipment Sales Value by Application, 2024 VS 2031
  • 6.5 China
    • 6.5.1 China Dry Etching Equipment Sales Value, 2020-2031
    • 6.5.2 China Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
    • 6.5.3 China Dry Etching Equipment Sales Value by Application, 2024 VS 2031
  • 6.6 Japan
    • 6.6.1 Japan Dry Etching Equipment Sales Value, 2020-2031
    • 6.6.2 Japan Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
    • 6.6.3 Japan Dry Etching Equipment Sales Value by Application, 2024 VS 2031
  • 6.7 South Korea
    • 6.7.1 South Korea Dry Etching Equipment Sales Value, 2020-2031
    • 6.7.2 South Korea Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
    • 6.7.3 South Korea Dry Etching Equipment Sales Value by Application, 2024 VS 2031
  • 6.8 Southeast Asia
    • 6.8.1 Southeast Asia Dry Etching Equipment Sales Value, 2020-2031
    • 6.8.2 Southeast Asia Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
    • 6.8.3 Southeast Asia Dry Etching Equipment Sales Value by Application, 2024 VS 2031
  • 6.9 India
    • 6.9.1 India Dry Etching Equipment Sales Value, 2020-2031
    • 6.9.2 India Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
    • 6.9.3 India Dry Etching Equipment Sales Value by Application, 2024 VS 2031

7 Company Profiles

  • 7.1 Lam Research
    • 7.1.1 Lam Research Company Information
    • 7.1.2 Lam Research Introduction and Business Overview
    • 7.1.3 Lam Research Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.1.4 Lam Research Dry Etching Equipment Product Offerings
    • 7.1.5 Lam Research Recent Development
  • 7.2 Tokyo Electron Limited
    • 7.2.1 Tokyo Electron Limited Company Information
    • 7.2.2 Tokyo Electron Limited Introduction and Business Overview
    • 7.2.3 Tokyo Electron Limited Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.2.4 Tokyo Electron Limited Dry Etching Equipment Product Offerings
    • 7.2.5 Tokyo Electron Limited Recent Development
  • 7.3 Applied Materials
    • 7.3.1 Applied Materials Company Information
    • 7.3.2 Applied Materials Introduction and Business Overview
    • 7.3.3 Applied Materials Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.3.4 Applied Materials Dry Etching Equipment Product Offerings
    • 7.3.5 Applied Materials Recent Development
  • 7.4 Hitachi High-Tech
    • 7.4.1 Hitachi High-Tech Company Information
    • 7.4.2 Hitachi High-Tech Introduction and Business Overview
    • 7.4.3 Hitachi High-Tech Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.4.4 Hitachi High-Tech Dry Etching Equipment Product Offerings
    • 7.4.5 Hitachi High-Tech Recent Development
  • 7.5 SEMES
    • 7.5.1 SEMES Company Information
    • 7.5.2 SEMES Introduction and Business Overview
    • 7.5.3 SEMES Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.5.4 SEMES Dry Etching Equipment Product Offerings
    • 7.5.5 SEMES Recent Development
  • 7.6 AMEC
    • 7.6.1 AMEC Company Information
    • 7.6.2 AMEC Introduction and Business Overview
    • 7.6.3 AMEC Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.6.4 AMEC Dry Etching Equipment Product Offerings
    • 7.6.5 AMEC Recent Development
  • 7.7 NAURA
    • 7.7.1 NAURA Company Information
    • 7.7.2 NAURA Introduction and Business Overview
    • 7.7.3 NAURA Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.7.4 NAURA Dry Etching Equipment Product Offerings
    • 7.7.5 NAURA Recent Development
  • 7.8 SPTS Technologies (KLA)
    • 7.8.1 SPTS Technologies (KLA) Company Information
    • 7.8.2 SPTS Technologies (KLA) Introduction and Business Overview
    • 7.8.3 SPTS Technologies (KLA) Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.8.4 SPTS Technologies (KLA) Dry Etching Equipment Product Offerings
    • 7.8.5 SPTS Technologies (KLA) Recent Development
  • 7.9 Oxford Instruments
    • 7.9.1 Oxford Instruments Company Information
    • 7.9.2 Oxford Instruments Introduction and Business Overview
    • 7.9.3 Oxford Instruments Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.9.4 Oxford Instruments Dry Etching Equipment Product Offerings
    • 7.9.5 Oxford Instruments Recent Development
  • 7.10 ULVAC
    • 7.10.1 ULVAC Company Information
    • 7.10.2 ULVAC Introduction and Business Overview
    • 7.10.3 ULVAC Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.10.4 ULVAC Dry Etching Equipment Product Offerings
    • 7.10.5 ULVAC Recent Development
  • 7.11 Plasma-Therm
    • 7.11.1 Plasma-Therm Company Information
    • 7.11.2 Plasma-Therm Introduction and Business Overview
    • 7.11.3 Plasma-Therm Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.11.4 Plasma-Therm Dry Etching Equipment Product Offerings
    • 7.11.5 Plasma-Therm Recent Development
  • 7.12 GigaLane
    • 7.12.1 GigaLane Company Information
    • 7.12.2 GigaLane Introduction and Business Overview
    • 7.12.3 GigaLane Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.12.4 GigaLane Dry Etching Equipment Product Offerings
    • 7.12.5 GigaLane Recent Development
  • 7.13 VM
    • 7.13.1 VM Company Information
    • 7.13.2 VM Introduction and Business Overview
    • 7.13.3 VM Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.13.4 VM Dry Etching Equipment Product Offerings
    • 7.13.5 VM Recent Development
  • 7.14 Jusung Engineering
    • 7.14.1 Jusung Engineering Company Information
    • 7.14.2 Jusung Engineering Introduction and Business Overview
    • 7.14.3 Jusung Engineering Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.14.4 Jusung Engineering Dry Etching Equipment Product Offerings
    • 7.14.5 Jusung Engineering Recent Development
  • 7.15 SAMCO
    • 7.15.1 SAMCO Company Information
    • 7.15.2 SAMCO Introduction and Business Overview
    • 7.15.3 SAMCO Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
    • 7.15.4 SAMCO Dry Etching Equipment Product Offerings
    • 7.15.5 SAMCO Recent Development

8 Industry Chain Analysis

  • 8.1 Dry Etching Equipment Industrial Chain
  • 8.2 Dry Etching Equipment Upstream Analysis
    • 8.2.1 Key Raw Materials
    • 8.2.2 Raw Materials Key Suppliers
    • 8.2.3 Manufacturing Cost Structure
  • 8.3 Midstream Analysis
  • 8.4 Downstream Analysis (Customers Analysis)
  • 8.5 Sales Model and Sales Channels
    • 8.5.1 Dry Etching Equipment Sales Model
    • 8.5.2 Sales Channel
    • 8.5.3 Dry Etching Equipment Distributors

9 Research Findings and Conclusion

10 Appendix

  • 10.1 Research Methodology
    • 10.1.1 Methodology/Research Approach
      • 10.1.1.1 Research Programs/Design
      • 10.1.1.2 Market Size Estimation
      • 10.1.1.3 Market Breakdown and Data Triangulation
    • 10.1.2 Data Source
      • 10.1.2.1 Secondary Sources
      • 10.1.2.2 Primary Sources
  • 10.2 Author Details
  • 10.3 Disclaimer

List of Tables

  • Table 1. Dry Etching Equipment Market Trends
  • Table 2. Dry Etching Equipment Market Drivers & Opportunity
  • Table 3. Dry Etching Equipment Market Challenges
  • Table 4. Dry Etching Equipment Market Restraints
  • Table 5. Global Dry Etching Equipment Revenue by Company (2020-2025) & (US$ Million)
  • Table 6. Global Dry Etching Equipment Revenue Market Share by Company (2020-2025)
  • Table 7. Global Dry Etching Equipment Sales Volume by Company (2020-2025) & (Units)
  • Table 8. Global Dry Etching Equipment Sales Volume Market Share by Company (2020-2025)
  • Table 9. Global Market Dry Etching Equipment Price by Company (2020-2025) & (K USD/Unit)
  • Table 10. Key Manufacturers Dry Etching Equipment Manufacturing Base and Headquarters
  • Table 11. Key Manufacturers Dry Etching Equipment Product Type
  • Table 12. Key Manufacturers Time to Begin Mass Production of Dry Etching Equipment
  • Table 13. Global Dry Etching Equipment Manufacturers Market Concentration Ratio (CR5 and HHI)
  • Table 14. Global Top Manufacturers Market Share by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Dry Etching Equipment as of 2024)
  • Table 15. Mergers & Acquisitions, Expansion Plans
  • Table 16. Global Dry Etching Equipment Sales Value by Type: 2020 VS 2024 VS 2031 (US$ Million)
  • Table 17. Global Dry Etching Equipment Sales Value by Type (2020-2025) & (US$ Million)
  • Table 18. Global Dry Etching Equipment Sales Value by Type (2026-2031) & (US$ Million)
  • Table 19. Global Dry Etching Equipment Sales Market Share in Value by Type (2020-2025)
  • Table 20. Global Dry Etching Equipment Sales Market Share in Value by Type (2026-2031)
  • Table 21. Global Dry Etching Equipment Sales Volume by Type: 2020 VS 2024 VS 2031 (Units)
  • Table 22. Global Dry Etching Equipment Sales Volume by Type (2020-2025) & (Units)
  • Table 23. Global Dry Etching Equipment Sales Volume by Type (2026-2031) & (Units)
  • Table 24. Global Dry Etching Equipment Sales Market Share in Volume by Type (2020-2025)
  • Table 25. Global Dry Etching Equipment Sales Market Share in Volume by Type (2026-2031)
  • Table 26. Global Dry Etching Equipment Price by Type (2020-2025) & (K USD/Unit)
  • Table 27. Global Dry Etching Equipment Price by Type (2026-2031) & (K USD/Unit)
  • Table 28. Global Dry Etching Equipment Sales Value by Application: 2020 VS 2024 VS 2031 (US$ Million)
  • Table 29. Global Dry Etching Equipment Sales Value by Application (2020-2025) & (US$ Million)
  • Table 30. Global Dry Etching Equipment Sales Value by Application (2026-2031) & (US$ Million)
  • Table 31. Global Dry Etching Equipment Sales Market Share in Value by Application (2020-2025)
  • Table 32. Global Dry Etching Equipment Sales Market Share in Value by Application (2026-2031)
  • Table 33. Global Dry Etching Equipment Sales Volume by Application: 2020 VS 2024 VS 2031 (Units)
  • Table 34. Global Dry Etching Equipment Sales Volume by Application (2020-2025) & (Units)
  • Table 35. Global Dry Etching Equipment Sales Volume by Application (2026-2031) & (Units)
  • Table 36. Global Dry Etching Equipment Sales Market Share in Volume by Application (2020-2025)
  • Table 37. Global Dry Etching Equipment Sales Market Share in Volume by Application (2026-2031)
  • Table 38. Global Dry Etching Equipment Price by Application (2020-2025) & (K USD/Unit)
  • Table 39. Global Dry Etching Equipment Price by Application (2026-2031) & (K USD/Unit)
  • Table 40. Global Dry Etching Equipment Sales Value by Region, (2020 VS 2024 VS 2031) & (US$ Million)
  • Table 41. Global Dry Etching Equipment Sales Value by Region (2020-2025) & (US$ Million)
  • Table 42. Global Dry Etching Equipment Sales Value by Region (2026-2031) & (US$ Million)
  • Table 43. Global Dry Etching Equipment Sales Value by Region (2020-2025) & (%)
  • Table 44. Global Dry Etching Equipment Sales Value by Region (2026-2031) & (%)
  • Table 45. Global Dry Etching Equipment Sales Volume by Region (Units): 2020 VS 2024 VS 2031
  • Table 46. Global Dry Etching Equipment Sales Volume by Region (2020-2025) & (Units)
  • Table 47. Global Dry Etching Equipment Sales Volume by Region (2026-2031) & (Units)
  • Table 48. Global Dry Etching Equipment Sales Volume by Region (2020-2025) & (%)
  • Table 49. Global Dry Etching Equipment Sales Volume by Region (2026-2031) & (%)
  • Table 50. Global Dry Etching Equipment Average Price by Region (2020-2025) & (K USD/Unit)
  • Table 51. Global Dry Etching Equipment Average Price by Region (2026-2031) & (K USD/Unit)
  • Table 52. Key Countries/Regions Dry Etching Equipment Sales Value Growth Trends, (US$ Million): 2020 VS 2024 VS 2031
  • Table 53. Key Countries/Regions Dry Etching Equipment Sales Value, (2020-2025) & (US$ Million)
  • Table 54. Key Countries/Regions Dry Etching Equipment Sales Value, (2026-2031) & (US$ Million)
  • Table 55. Key Countries/Regions Dry Etching Equipment Sales Volume, (2020-2025) & (Units)
  • Table 56. Key Countries/Regions Dry Etching Equipment Sales Volume, (2026-2031) & (Units)
  • Table 57. Lam Research Company Information
  • Table 58. Lam Research Introduction and Business Overview
  • Table 59. Lam Research Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 60. Lam Research Dry Etching Equipment Product Offerings
  • Table 61. Lam Research Recent Development
  • Table 62. Tokyo Electron Limited Company Information
  • Table 63. Tokyo Electron Limited Introduction and Business Overview
  • Table 64. Tokyo Electron Limited Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 65. Tokyo Electron Limited Dry Etching Equipment Product Offerings
  • Table 66. Tokyo Electron Limited Recent Development
  • Table 67. Applied Materials Company Information
  • Table 68. Applied Materials Introduction and Business Overview
  • Table 69. Applied Materials Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 70. Applied Materials Dry Etching Equipment Product Offerings
  • Table 71. Applied Materials Recent Development
  • Table 72. Hitachi High-Tech Company Information
  • Table 73. Hitachi High-Tech Introduction and Business Overview
  • Table 74. Hitachi High-Tech Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 75. Hitachi High-Tech Dry Etching Equipment Product Offerings
  • Table 76. Hitachi High-Tech Recent Development
  • Table 77. SEMES Company Information
  • Table 78. SEMES Introduction and Business Overview
  • Table 79. SEMES Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 80. SEMES Dry Etching Equipment Product Offerings
  • Table 81. SEMES Recent Development
  • Table 82. AMEC Company Information
  • Table 83. AMEC Introduction and Business Overview
  • Table 84. AMEC Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 85. AMEC Dry Etching Equipment Product Offerings
  • Table 86. AMEC Recent Development
  • Table 87. NAURA Company Information
  • Table 88. NAURA Introduction and Business Overview
  • Table 89. NAURA Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 90. NAURA Dry Etching Equipment Product Offerings
  • Table 91. NAURA Recent Development
  • Table 92. SPTS Technologies (KLA) Company Information
  • Table 93. SPTS Technologies (KLA) Introduction and Business Overview
  • Table 94. SPTS Technologies (KLA) Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 95. SPTS Technologies (KLA) Dry Etching Equipment Product Offerings
  • Table 96. SPTS Technologies (KLA) Recent Development
  • Table 97. Oxford Instruments Company Information
  • Table 98. Oxford Instruments Introduction and Business Overview
  • Table 99. Oxford Instruments Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 100. Oxford Instruments Dry Etching Equipment Product Offerings
  • Table 101. Oxford Instruments Recent Development
  • Table 102. ULVAC Company Information
  • Table 103. ULVAC Introduction and Business Overview
  • Table 104. ULVAC Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 105. ULVAC Dry Etching Equipment Product Offerings
  • Table 106. ULVAC Recent Development
  • Table 107. Plasma-Therm Company Information
  • Table 108. Plasma-Therm Introduction and Business Overview
  • Table 109. Plasma-Therm Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 110. Plasma-Therm Dry Etching Equipment Product Offerings
  • Table 111. Plasma-Therm Recent Development
  • Table 112. GigaLane Company Information
  • Table 113. GigaLane Introduction and Business Overview
  • Table 114. GigaLane Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 115. GigaLane Dry Etching Equipment Product Offerings
  • Table 116. GigaLane Recent Development
  • Table 117. VM Company Information
  • Table 118. VM Introduction and Business Overview
  • Table 119. VM Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 120. VM Dry Etching Equipment Product Offerings
  • Table 121. VM Recent Development
  • Table 122. Jusung Engineering Company Information
  • Table 123. Jusung Engineering Introduction and Business Overview
  • Table 124. Jusung Engineering Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 125. Jusung Engineering Dry Etching Equipment Product Offerings
  • Table 126. Jusung Engineering Recent Development
  • Table 127. SAMCO Company Information
  • Table 128. SAMCO Introduction and Business Overview
  • Table 129. SAMCO Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2020-2025)
  • Table 130. SAMCO Dry Etching Equipment Product Offerings
  • Table 131. SAMCO Recent Development
  • Table 132. Key Raw Materials Lists
  • Table 133. Raw Materials Key Suppliers Lists
  • Table 134. Dry Etching Equipment Downstream Customers
  • Table 135. Dry Etching Equipment Distributors List
  • Table 136. Research Programs/Design for This Report
  • Table 137. Key Data Information from Secondary Sources
  • Table 138. Key Data Information from Primary Sources

List of Figures

  • Figure 1. Dry Etching Equipment Product Picture
  • Figure 2. Global Dry Etching Equipment Sales Value, 2020 VS 2024 VS 2031 (US$ Million)
  • Figure 3. Global Dry Etching Equipment Sales Value (2020-2031) & (US$ Million)
  • Figure 4. Global Dry Etching Equipment Sales Volume (2020-2031) & (Units)
  • Figure 5. Global Dry Etching Equipment Sales Price (2020-2031) & (K USD/Unit)
  • Figure 6. Dry Etching Equipment Report Years Considered
  • Figure 7. Global Dry Etching Equipment Players Revenue Ranking (2024) & (US$ Million)
  • Figure 8. Global Dry Etching Equipment Players Sales Volume Ranking (2024) & (Units)
  • Figure 9. The 5 and 10 Largest Manufacturers in the World: Market Share by Dry Etching Equipment Revenue in 2024
  • Figure 10. Dry Etching Equipment Market Share by Company Type (Tier 1, Tier 2, and Tier 3): 2020 VS 2024
  • Figure 11. Inductively Coupled Plasma (ICP) Picture
  • Figure 12. Capacitive Coupled Plasma (CCP) Picture
  • Figure 13. Reactive Ion Etching (RIE) Picture
  • Figure 14. Deep Reactive Ion Etching (DRIE) Picture
  • Figure 15. Others Picture
  • Figure 16. Global Dry Etching Equipment Sales Value by Type (2020 VS 2024 VS 2031) & (US$ Million)
  • Figure 17. Global Dry Etching Equipment Sales Value Market Share by Type, 2024 & 2031
  • Figure 18. Global Dry Etching Equipment Sales Volume by Type (2020 VS 2024 VS 2031) & (Units)
  • Figure 19. Global Dry Etching Equipment Sales Volume Market Share by Type, 2024 & 2031
  • Figure 20. Global Dry Etching Equipment Price by Type (2020-2031) & (K USD/Unit)
  • Figure 21. Product Picture of Logic and Memory
  • Figure 22. Product Picture of MEMS
  • Figure 23. Product Picture of Power Device
  • Figure 24. Product Picture of Others
  • Figure 25. Global Dry Etching Equipment Sales Value by Application (2020 VS 2024 VS 2031) & (US$ Million)
  • Figure 26. Global Dry Etching Equipment Sales Value Market Share by Application, 2024 & 2031
  • Figure 27. Global Dry Etching Equipment Sales Volume by Application (2020 VS 2024 VS 2031) & (Units)
  • Figure 28. Global Dry Etching Equipment Sales Volume Market Share by Application, 2024 & 2031
  • Figure 29. Global Dry Etching Equipment Price by Application (2020-2031) & (K USD/Unit)
  • Figure 30. North America Dry Etching Equipment Sales Value (2020-2031) & (US$ Million)
  • Figure 31. North America Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
  • Figure 32. Europe Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 33. Europe Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
  • Figure 34. Asia Pacific Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 35. Asia Pacific Dry Etching Equipment Sales Value by Region (%), 2024 VS 2031
  • Figure 36. South America Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 37. South America Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
  • Figure 38. Middle East & Africa Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 39. Middle East & Africa Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
  • Figure 40. Key Countries/Regions Dry Etching Equipment Sales Value (%), (2020-2031)
  • Figure 41. Key Countries/Regions Dry Etching Equipment Sales Volume (%), (2020-2031)
  • Figure 42. United States Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 43. United States Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • Figure 44. United States Dry Etching Equipment Sales Value by Application (%), 2024 VS 2031
  • Figure 45. Europe Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 46. Europe Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • Figure 47. Europe Dry Etching Equipment Sales Value by Application (%), 2024 VS 2031
  • Figure 48. China Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 49. China Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • Figure 50. China Dry Etching Equipment Sales Value by Application (%), 2024 VS 2031
  • Figure 51. Japan Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 52. Japan Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • Figure 53. Japan Dry Etching Equipment Sales Value by Application (%), 2024 VS 2031
  • Figure 54. South Korea Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 55. South Korea Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • Figure 56. South Korea Dry Etching Equipment Sales Value by Application (%), 2024 VS 2031
  • Figure 57. Southeast Asia Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 58. Southeast Asia Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • Figure 59. Southeast Asia Dry Etching Equipment Sales Value by Application (%), 2024 VS 2031
  • Figure 60. India Dry Etching Equipment Sales Value, (2020-2031) & (US$ Million)
  • Figure 61. India Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • Figure 62. India Dry Etching Equipment Sales Value by Application (%), 2024 VS 2031
  • Figure 63. Dry Etching Equipment Industrial Chain
  • Figure 64. Dry Etching Equipment Manufacturing Cost Structure
  • Figure 65. Channels of Distribution (Direct Sales, and Distribution)
  • Figure 66. Bottom-up and Top-down Approaches for This Report
  • Figure 67. Data Triangulation
  • Figure 68. Key Executives Interviewed