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市場調查報告書
商品編碼
2113908
真空幫浦:市佔率分析、產業趨勢與統計、成長預測(2026-2031)Vacuum Pump - Market Share Analysis, Industry Trends & Statistics, Growth Forecasts (2026 - 2031) |
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根據 Mordor Intelligence 預測,真空幫浦市場規模將從 2025 年的 74.9 億美元成長到 2026 年的 80.7 億美元,到 2031 年將達到 112.3 億美元,2026 年至 2031 年的複合年成長率為 6.83%。

本報告依泵浦原理(機械式、捕集式)、潤滑方式(乾式真空幫浦、油封/濕式真空幫浦)、真空度(粗真空/低真空、中真空、高真空、超高真空/極高真空)、終端用戶產業(化學、食品飲料、發電、電池製造、木材/造紙/紙漿等)及地區進行分類。市場預測以美元(USD)計價。
EUV掃描儀在低於10⁻⁶帕斯卡的真空度下運行,以防止13.5奈米光子的散射,這正推動渦輪分子泵和低溫泵規格的重大變革。 ASML的Twinscan NXE平台整合了一個多段渦輪分子幫浦陣列,能夠在30分鐘內抽空一立方公尺的腔室。亞利桑那州、德克薩斯州和俄亥俄州晶圓廠的擴建總合投資將超過2000億美元,這意味著每個晶圓廠的每台EUV光刻機需要40-60台泵,此外,晶圓廠內的其他區域還需要200-300台泵。從7奈米節點過渡到3奈米節點將使蝕刻和沈積製程的耗時增加近30%,導致每片晶圓的泵浦使用量增加。隨著營運商對10奈米以下奈米顆粒的控制需求不斷成長,運作中設施的維修合約將帶來可觀的售後市場收入。
預計2024年至2030年間,全球液化天然氣(LNG)產能將增加45%,其中卡達、美國墨西哥灣沿岸和澳洲每年將新增2.5億噸產能。每套液化天然氣生產線配備10至15台大型旋片泵或液環泵,額定功率為500至2000千瓦,用於脫水、除汞和冷媒密封氣體。光是卡達能源公司的北方氣田項目,其真空設備合約價值就超過1億美元。國際海事組織(IMO)日益嚴格的碳排放強度法規正在加速浮體式儲存再氣化裝置(FSRU)的部署,每艘FSRU通常配備6至8台安定器泵浦和貨物裝卸泵浦。
釹鐵硼磁鐵被廣泛應用於約四分之三的渦輪分子泵中,但隨著中國收緊出口配額,氧化釹的價格已從2024年1月的每公斤68美元上漲至2025年12月的每公斤94美元。由此導致的材料成本飆升使高階泵浦的成本增加了800至1200美元,給毛利率帶來了壓力,尤其是在多年期OEM供貨合約限制價格上漲的情況下。而鐵氧體和開關磁阻驅動等替代技術會導致能源效率降低15%至20%,馬達外殼尺寸增加高達40%,難以安裝在小型半導體裝置中。
到2025年,機械泵將佔真空泵市場55.74%的佔有率,其中轉葉、螺桿泵、爪式泵和羅茨泵是食品、木材和液化天然氣加工領域的主要類型。捕集泵、低溫泵、吸氣泵和離子泵雖然市佔率較小,但預計將以7.29%的複合年成長率成長。這項轉變主要受量子計算用稀釋冷凍機和核融合能源用託卡馬克裝置的需求驅動,這些裝置需要在低於10⁻⁸帕斯卡的真空度下無振動運作。 ULVAC的LS系列將低溫級整合到螺桿泵殼體中,消除了電磁干擾,同時實現了比同類機械泵低一個數量級的基壓。同時,總部位於英國的工業聚變解決方案公司(Industrial Fusion Solutions)簽署了一份價值22.5萬英鎊的契約,用於開發一款組合式低溫原型機,預計於2025年上市,這表明聚變領域對核融合泵的需求正在成長。
由於初始成本高昂且需要專業維護技能,捕集技術的應用受到阻礙,但它可以透過無油運行、完全消除回流以及延長維護週期來降低整體擁有成本。隨著極紫外光刻微影術向環柵電晶體過渡,吸氣劑幫浦陣列的應用日益廣泛,以配合渦輪分子幫浦前端實現無碳氫化合物真空。機械幫浦供應商正在推出結合螺桿幫浦和低溫面板幫浦前置作業時間的混合產品,但組件整合的複雜性導致採購週期延長。
預計到2025年,乾式幫浦的銷售額將佔總銷售額的64.89%,並在2031年之前維持7.23%的複合年成長率。這項轉變的驅動力是PFAS法規和無塵室要求,根據SEMI S2指南,這些要求將碳氫化合物回流限制在10⁻⁹托升秒⁻¹以內。愛德華茲真空公司位於紐約的工廠由《晶片法案》(CHIPS Act)資助,旨在四周內向國內供應半導體級乾式螺桿泵,而從亞洲進口則需要12-16週。安捷倫的IDP-45和荏原的EV-X的推出進一步凸顯了供應商對適用於腐蝕性蝕刻化學品和低噪音實驗室環境的無油技術的關注。
在化學蒸餾、發電和傳統製藥生產線等產業,由於資金預算限制和腐蝕性氣體負荷,乾式真空幫浦難以引入,因此油封式真空幫浦仍佔據一定地位。然而,隨著廢油處理成本、潤滑合規性審核以及意外停機維護等運作在總成本模型中日益凸顯,即使是較保守的業者也在重新評估生命週期經濟效益。因此,儘管乾式真空幫浦的初始成本高出40%至60%,但預計其市場規模的成長速度將超過油封式真空幫浦。
到2025年,亞太地區將佔全球銷售額的39.72%,成為真空幫浦市場最大的區域。這一主導地位反映了中國在設備本土化方面的努力、韓國記憶體晶片生產的擴張以及日本強大的供應商基礎。儘管美國的出口限制阻礙了先進製造設備的進口,但像Wintech和Kashiyama這樣的日本國內製造商正在獲得成熟節點半導體和太陽能生產線的訂單。三星和SK海力士透過安裝用於高頻寬記憶體和超過200層的3D NAND快閃記憶體堆疊的真空泵,佔據了該地區五分之一的需求。 Ebara在韓國的第二家大修廠進一步加強了其本地服務基礎設施。
中東是成長最快的地區,預計到2031年複合年成長率將達到7.89%。卡達能源公司的北方油田東部和南部項目正在推動超過1億美元的契約,每個項目都將部署多達15台大型轉葉或液環式真空泵機組。沙烏地阿拉伯的「2030願景」計畫旨在擴大石化工廠,而阿拉伯聯合大公國的氫能計畫則推動了對氫兼容型渦輪分子泵的需求。全部區域已宣佈在液化天然氣、石化和海水淡化領域的總投資超過3000億美元,預計這些項目將在預測期內使該地區的真空泵市場規模翻倍。預測性維護平台的日益普及也有望拓寬售後市場的收入來源。
預計到2025年,北美將佔全球銷售額的約11%,隨著愛德華茲真空公司位於加州傑納西縣的工廠和英特爾投資1000億美元的俄亥俄州綜合設施投入量產,這一佔有率預計將進一步成長。這些投入量產將把前置作業時間縮短至四周,並符合《晶片法案》(CHIPS Act)的國內採購要求。歐洲目前約佔3%的市場佔有率,預計電池超級工廠和REPowerEU電解槽線(需要高真空乾燥和洩漏測試系統)將進一步推動需求成長。南美和非洲合計佔中個位數佔有率,其中巴西的紙漿產業和南非的石化工廠是訂單的主要驅動力,而採礦和基礎設施項目也正在創造更多機會。
According to Mordor Intelligence, the vacuum pump market size is expected to grow from USD 7.49 billion in 2025 to USD 8.07 billion in 2026 and is forecast to reach USD 11.23 billion by 2031 at 6.83% CAGR over 2026-2031.

This report is Segmented by Pump Principle (Mechanical, and Entrapment), Lubrication (Dry Vacuum Pumps, and Oil-Sealed / Wet Vacuum Pumps), Vacuum Level (Rough and Low, Medium, High, Ultra-High / Extreme), End-User Industry (Chemical Processing, Food and Beverage, Power Generation, Battery Manufacturing, Wood Paper and Pulp, and More), and Geography. The Market Forecasts are Provided in Terms of Value (USD).
EUV scanners run below 10-6 pascal to prevent 13.5-nanometer photons from scattering, driving a step change in turbomolecular and cryogenic specifications. ASML's Twinscan NXE platforms integrate multistage turbomolecular arrays that evacuate 1 m3 chambers in under 30 minutes. Fab expansion in Arizona, Texas, and Ohio collectively exceeds USD 200 billion, each site requiring 40-60 pumps per EUV tool and 200-300 pumps elsewhere in the fab. Transition from 7-nm to 3-nm nodes increases the etch and deposition steps by almost 30%, boosting pump content per wafer start. Refurbishment contracts for the installed base present an attractive aftermarket annuity as operators demand sub-10-nm particulate control.
Global LNG liquefaction capacity is poised to climb 45% between 2024 and 2030, adding nearly 250 million tonnes per annum in Qatar, the U.S. Gulf Coast, and Australia. Each train employs 10-15 large rotary vane or liquid-ring pumps rated at 500-2,000 kW for dehydration, mercury removal, and refrigerant seal gas. Qatar Energy's North Field projects alone represent vacuum equipment contracts over USD 100 million. Stricter International Maritime Organization carbon-intensity rules are accelerating the deployment of floating storage and regasification units, each of which adds 6-8 ballast and cargo containment pumps.
Neodymium-iron-boron magnets power about three-quarters of turbomolecular pumps, yet neodymium oxide climbed from USD 68 kg-1 in January 2024 to USD 94 kg-1 by December 2025 after China tightened export quotas. Resulting material cost inflation added USD 800-1,200 per high-end pump, eroding gross margins where multi-year OEM supply deals cap price pass-through. Alternatives such as ferrite or switched-reluctance drives sacrifice 15-20% energy efficiency and enlarge motor housings by up to 40%, complicating installation in compact semiconductor tools.
Other drivers and restraints analyzed in the detailed report include:
For complete list of drivers and restraints, kindly check the Table Of Contents.
Mechanical pumps generated 55.74% of the vacuum pump market in 2025, dominated by rotary vane, screw, claw, and roots designs used in food, wood, and LNG processing. Entrapment solutions, cryogenic, getter, and ion pumps account for a smaller base but are forecast to grow at a 7.29% CAGR. The shift stems from quantum-computing dilution refrigerators and fusion-energy tokamaks that demand vibration-free operation below 10-8 pascal. ULVAC's LS Series integrates cryogenic stages into screw housings, eliminating electromagnetic interference while delivering base pressures an order of magnitude lower than those of mechanical peers. Meanwhile, the United Kingdom's Industrial Fusion Solutions awarded a GBP 225,000 contract for a compound cryogenic prototype in 2025, highlighting nascent demand in the fusion sector.
Entrapment adoption is tempered by higher acquisition costs and specialized maintenance skills, yet total ownership savings accrue through oil-free operation, zero backstreaming, and extended mean time between service intervals. As extreme ultraviolet lithography migrates toward gate-all-around transistors, getter pumping arrays increasingly supplement turbomolecular forelines to achieve hydrocarbon-free vacuums. Mechanical suppliers respond with hybrid screw-plus-cryopanel offerings, but the complexity of component integration inflates procurement lead times.
Dry pumps accounted for 64.89% of revenue in 2025 and are projected to maintain a 7.23% CAGR through 2031. The transition is propelled by PFAS restrictions and cleanroom mandates that cap hydrocarbon backstreaming at 10-9 torr-liters s-1 under SEMI S2 guidelines. Edwards Vacuum's CHIPS-Act-funded New York plant aims to deliver domestically semiconductor-grade dry screw units within 4 weeks, compared with 12-16 weeks for Asian imports. Agilent's IDP-45 and Ebara's EV-X launches further underscore the suppliers' focus on oil-free technologies tuned for corrosive etch chemistries and low-noise laboratory settings.
Oil-sealed variants retain footholds in chemical distillation, power, and legacy pharma lines where capital budgets or corrosive gas loads complicate the adoption of dry systems. Yet even conservative operators are reevaluating lifecycle economics as waste-oil disposal fees, lubricant compliance audits, and unexpected maintenance stoppages surface in total cost models. The vacuum pump market size for dry architectures is therefore set to expand faster than that of oil-sealed peers, despite a 40-60% upfront premium.
Asia Pacific accounted for 39.72% of global revenue in 2025, making it the region with the largest vacuum pump market share. This leadership reflects China's drive to localize equipment, South Korea's expansion of memory chip production, and Japan's entrenched supplier base. Domestic makers such as Wintek and Kashiyama are winning orders in mature-node semiconductor and photovoltaic lines as United States export controls restrict the import of advanced tools. Samsung and SK Hynix together accounted for one-fifth of regional demand by adding pumps for high-bandwidth memory and 3D NAND stacks with more than 200 layers. Ebara's second overhaul plant in South Korea further strengthens local service capacity.
The Middle East is the fastest-growing region, with a forecast CAGR of 7.89% through 2031. Qatar Energy's North Field East and South projects each deploy up to 15 large rotary vane or liquid-ring units, driving contracts worth more than USD 100 million. Saudi Arabia's Vision 2030 petrochemical build-out and the United Arab Emirates' hydrogen programs add demand for hydrogen-compatible turbomolecular pumps. Announced LNG, petrochemical, and desalination investments across the region exceed USD 300 billion, a pipeline expected to double the vacuum pump market size there over the forecast window. Rising adoption of predictive-maintenance platforms should also broaden aftermarket revenue streams.
North America generated about 11% of 2025 global sales, and this share will climb as Edwards Vacuum's Genesee County plant and Intel's USD 100 billion Ohio complex reach volume, cutting lead times to four weeks and meeting CHIPS Act domestic content rules. Europe, holding roughly 3%, should see incremental gains from battery gigafactories and REPowerEU electrolyzer lines that need high-vacuum drying and leak-testing systems. South America and Africa together account for a mid-single-digit share, with Brazil's pulp sector and South Africa's petrochemical plants anchoring orders while mining and infrastructure projects create additional opportunities.